Plasma ion source for in situ ion bombardment in a soft x-ray magnetic scattering diffractometer

Journal Article · Tue May 15 00:00:00 EDT 2012 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.4718937· OSTI ID:22072302

Lengemann, Daniel; Engel, Dieter; Ehresmann, Arno ^[1]

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1. Institute of Physics, EP IV, University of Kassel, Heinrich-Plett-Str.40, 34132 Kassel (Germany) and Center for Interdisciplinary Nanostructure Science and Technology (CINSaT), University of Kassel, Heinrich-Plett-Str.40, 34132 Kassel (Germany)

A new plasma ion source for in situ keV He ion bombardment of solid state samples or thin films was designed and built for ion fluences between 1 x 10{sup 12} and 1 x 10{sup 17} ions/cm{sup 2}. The system was designed to be mounted to different diffraction chambers for soft x-ray resonant magnetic scattering. Without breaking the vacuum due to He-ion bombardment, structural and magnetic modifications of the samples can be studied in situ and element specifically.

• OSTI ID: 22072302
• Journal Information: Review of Scientific Instruments, Vol. 83, Issue 5; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
COLLISIONS
DIFFRACTION
HELIUM IONS
ION BEAMS
ION SOURCES
KEV RANGE
PLASMA
SOFT X RADIATION
THIN FILMS
X-RAY DIFFRACTOMETERS