Characteristics of low-energy ion beams extracted from a wire electrode geometry
- Graduate School of Engineering, Doshisha University, Kyotanabe, Kyoto 610-0321 (Japan)
- Novelion Systems Co. Ltd., Kyotanabe, Kyoto 610-0332 (Japan)
- Faculty of Life and Medical Sciences, Doshisha University, Kyotanabe, Kyoto 610-0321 (Japan)
Beams of argon ions with energies less than 50 eV were extracted from an ion source through a wire electrode extractor geometry. A retarding potential energy analyzer (RPEA) was constructed in order to characterize the extracted ion beams. The single aperture RPEA was used to determine the ion energy distribution function, the mean ion energy and the ion beam energy spread. The multi-cusp hot cathode ion source was capable of producing a low electron temperature gas discharge to form quiescent plasmas from which ion beam energy as low as 5 eV was realized. At 50 V extraction potential and 0.1 A discharge current, the ion beam current density was around 0.37 mA/cm{sup 2} with an energy spread of 3.6 V or 6.5% of the mean ion energy. The maximum ion beam current density extracted from the source was 0.57 mA/cm{sup 2} for a 50 eV ion beam and 1.78 mA/cm{sup 2} for a 100 eV ion beam.
- OSTI ID:
- 22066287
- Journal Information:
- Review of Scientific Instruments, Vol. 83, Issue 2; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
APERTURES
ARGON IONS
BEAM EXTRACTION
CATHODES
CURRENT DENSITY
CUSPED GEOMETRIES
ELECTRIC DISCHARGES
ELECTRON TEMPERATURE
ENERGY SPECTRA
EV RANGE
ION BEAMS
ION SOURCES
ION TEMPERATURE
POTENTIAL ENERGY
WIRES