Reduction in thermal boundary conductance due to proton implantation in silicon and sapphire

Journal Article · Mon Jun 06 00:00:00 EDT 2011 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.3592822· OSTI ID:21518470

Hopkins, Patrick E ^[1]; Hattar, Khalid; Beechem, Thomas; Ihlefeld, Jon F; Piekos, Edward S ^[1]; Medlin, Douglas L ^[2]

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1. Sandia National Laboratories, Albuquerque, New Mexico 87123 (United States)
2. Sandia National Laboratories, Livermore, California 87123 (United States)

We measure the thermal boundary conductance across Al/Si and Al/Al{sub 2}O{sub 3} interfaces that are subjected to varying doses of proton ion implantation with time domain thermoreflectance. The proton irradiation creates a major reduction in the thermal boundary conductance that is much greater than the corresponding decrease in the thermal conductivities of both the Si and Al{sub 2}O{sub 3} substrates into which the ions were implanted. Specifically, the thermal boundary conductances decrease by over an order of magnitude, indicating that proton irradiation presents a unique method to systematically decrease the thermal boundary conductance at solid interfaces.

• OSTI ID: 21518470
• Journal Information: Applied Physics Letters, Vol. 98, Issue 23; Other Information: DOI: 10.1063/1.3592822; (c) 2011 American Institute of Physics; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ALUMINIUM
ALUMINIUM OXIDES
CRYSTAL DEFECTS
INTERFACES
ION IMPLANTATION
IONS
IRRADIATION
PHYSICAL RADIATION EFFECTS
PROTON BEAMS
SAPPHIRE
SEMICONDUCTOR MATERIALS
SILICON
SOLIDS
SUBSTRATES
THERMAL CONDUCTIVITY
ALUMINIUM COMPOUNDS
BEAMS
CHALCOGENIDES
CHARGED PARTICLES
CORUNDUM
CRYSTAL STRUCTURE
ELEMENTS
MATERIALS
METALS
MINERALS
NUCLEON BEAMS
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
PARTICLE BEAMS
PHYSICAL PROPERTIES
RADIATION EFFECTS
SEMIMETALS
THERMODYNAMIC PROPERTIES