Measuring sub-surface spatially varying thermal conductivity of silicon implanted with krypton

Pfeifer, Thomas W.; Tomko, John A.; Hoglund, Eric; Scott, Ethan A.; Hattar, Khalid; Huynh, Kenny; Liao, Michael; Goorsky, Mark; Hopkins, Patrick E.

doi:10.1063/5.0094876

Title: Measuring sub-surface spatially varying thermal conductivity of silicon implanted with krypton

Journal Article · Fri Aug 19 00:00:00 EDT 2022 · Journal of Applied Physics

DOI:https://doi.org/10.1063/5.0094876· OSTI ID:1887406

^[1];

^[2]; Hattar, Khalid ^[3]; Huynh, Kenny ^[4];

^[4];

^[4]; Hopkins, Patrick E. ^[1]

University of Virginia, Charlottesville, VA (United States)
University of Virginia, Charlottesville, VA (United States); Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
University of California, Los Angeles, CA (United States)

The thermal properties of semiconductors following exposure to ion irradiation are of great interest for the cooling of electronic devices; however, gradients in composition and structure due to irradiation often make the measurement difficult. Furthermore, the nature of spatial variations in thermal resistances due to spatially varying ion irradiation damage is not well understood. In this work, we develop an advancement in the analysis of time-domain thermoreflectance to account for spatially varying thermal conductivity in a material resulting from a spatial distribution of defects. We then use this method to measure the near-surface (≲1 μm) thermal conductivity of silicon wafers irradiated with Kr⁺ ions, which has an approximate Gaussian distribution centered 260 nm into the sample. Our numerical analysis presented here allows for the spatial gradient of thermal conductivity to be extracted via what is fundamentally a volumetric measurement technique. We validate our findings via transmission electron microscopy, which is able to confirm the spatial variation of the sub-surface silicon structure, and provide additional insight into the local structure resulting from the effects of ion bombardment. Thermal measurements found the ion stopping region to have a nearly 50x reduction in thermal conductivity as compared to pristine silicon, while TEM showed the region was not fully amorphized. Our results suggest this drastic reduction in silicon thermal conductivity is primarily driven by structural defects in crystalline regions along with boundary scattering between amorphous and crystalline regions, with a negligible contribution being due to implanted krypton ions themselves.

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Research Organization:: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA); US Department of the Navy, Office of Naval Research (ONR); USDOE Office of Science (SC); Alexander von Humboldt Foundation

Grant/Contract Number:: NA0003525; N00014-18-1-2429

OSTI ID:: 1887406

Report Number(s):: SAND2022-11270J; 709401; TRN: US2310044

Journal Information:: Journal of Applied Physics, Vol. 132, Issue 7; ISSN 0021-8979

Publisher:: American Institute of Physics (AIP)Copyright Statement

Country of Publication:: United States

Language:: English

References (55)

Thermal Conductivity of Amorphous Silicon Wada, Hiroshi; Kamijoh, Takeshi Japanese Journal of Applied Physics, Vol. 35, Issue Part 2, No. 5B https://doi.org/10.1143/JJAP.35.L648	journal	May 1996
Amorphization and graphitization of single-crystal diamond — A transmission electron microscopy study Hickey, D. P.; Jones, K. S.; Elliman, R. G. Diamond and Related Materials, Vol. 18, Issue 11 https://doi.org/10.1016/j.diamond.2009.08.012	journal	November 2009
Misconceptions impairing the validity of the stopping power tables in the SRIM library and suggestions for doing better in the future Wittmaack, Klaus Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 380 https://doi.org/10.1016/j.nimb.2016.04.057	journal	August 2016
A meeting with Enrico Fermi Dyson, Freeman Nature, Vol. 427, Issue 6972 https://doi.org/10.1038/427297a	journal	January 2004
Observation of reduced thermal conductivity in a metal-organic framework due to the presence of adsorbates Babaei, Hasan; DeCoster, Mallory E.; Jeong, Minyoung Nature Communications, Vol. 11, Issue 1 https://doi.org/10.1038/s41467-020-17822-0	journal	August 2020
Arrest of He bubble growth in Cu–Nb multilayer nanocomposites Hattar, K.; Demkowicz, M. J.; Misra, A. Scripta Materialia, Vol. 58, Issue 7 https://doi.org/10.1016/j.scriptamat.2007.11.007	journal	April 2008
Thermal conductivity of epitaxial layers of dilute SiGe alloys Cahill, David G.; Watanabe, Fumiya; Rockett, Angus Physical Review B, Vol. 71, Issue 23 https://doi.org/10.1103/PhysRevB.71.235202	journal	June 2005
Thermal conductivity of isotopically pure and Ge-doped Si epitaxial layers from $300 to 550 K$ Cahill, David G.; Watanabe, Fumiya Physical Review B, Vol. 70, Issue 23 https://doi.org/10.1103/PhysRevB.70.235322	journal	December 2004
Analysis of heat flow in layered structures for time-domain thermoreflectance Cahill, David G. Review of Scientific Instruments, Vol. 75, Issue 12 https://doi.org/10.1063/1.1819431	journal	December 2004
Ultrahigh thermal conductivity in isotope-enriched cubic boron nitride Chen, Ke; Song, Bai; Ravichandran, Navaneetha K. Science, Vol. 367, Issue 6477 https://doi.org/10.1126/science.aaz6149	journal	January 2020
Ion-beam processing of silicon at keV energies: A molecular-dynamics study Caturla, M. -J.; Díaz de la Rubia, T.; Marqués, L. A. Physical Review B, Vol. 54, Issue 23 https://doi.org/10.1103/PhysRevB.54.16683	journal	December 1996
Thermoreflectance of metal transducers for time-domain thermoreflectance Wang, Yuxin; Park, Ji Yong; Koh, Yee Kan Journal of Applied Physics, Vol. 108, Issue 4 https://doi.org/10.1063/1.3457151	journal	August 2010
Uncertainty analysis of thermoreflectance measurements Yang, Jia; Ziade, Elbara; Schmidt, Aaron J. Review of Scientific Instruments, Vol. 87, Issue 1 https://doi.org/10.1063/1.4939671	journal	January 2016
SRIM – The stopping and range of ions in matter (2010) Ziegler, James F.; Ziegler, M. D.; Biersack, J. P. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 268, Issue 11-12 https://doi.org/10.1016/j.nimb.2010.02.091	journal	June 2010
Probing thermal conductivity of subsurface, amorphous layers in irradiated diamond Scott, Ethan A.; Braun, Jeffrey L.; Hattar, Khalid Journal of Applied Physics, Vol. 129, Issue 5 https://doi.org/10.1063/5.0038972	journal	February 2021
The Stopping and Range of Ions in Matter Ziegler, James F.; Biersack, Jochen P. Treatise on Heavy-Ion Science https://doi.org/10.1007/978-1-4615-8103-1_3	book	January 1985
Note on the artefacts in SRIM simulation of sputtering Shulga, V. I. Applied Surface Science, Vol. 439 https://doi.org/10.1016/j.apsusc.2018.01.039	journal	May 2018
Thermal conductivity measurements via time-domain thermoreflectance for the characterization of radiation induced damage Cheaito, Ramez; Gorham, Caroline S.; Misra, Amit Journal of Materials Research, Vol. 30, Issue 9 https://doi.org/10.1557/jmr.2015.11	journal	May 2015
Interfacial Defect Vibrations Enhance Thermal Transport in Amorphous Multilayers with Ultrahigh Thermal Boundary Conductance Giri, Ashutosh; King, Sean W.; Lanford, William A. Advanced Materials, Vol. 30, Issue 44 https://doi.org/10.1002/adma.201804097	journal	September 2018
Invited Article: Micron resolution spatially resolved measurement of heat capacity using dual-frequency time-domain thermoreflectance Wei, Changdong; Zheng, Xuan; Cahill, David G. Review of Scientific Instruments, Vol. 84, Issue 7 https://doi.org/10.1063/1.4815867	journal	July 2013
Role of Disorder and Anharmonicity in the Thermal Conductivity of Silicon-Germanium Alloys: A First-Principles Study Garg, Jivtesh; Bonini, Nicola; Kozinsky, Boris Physical Review Letters, Vol. 106, Issue 4 https://doi.org/10.1103/PhysRevLett.106.045901	journal	January 2011
Phonon transport at interfaces between different phases of silicon and germanium Gordiz, Kiarash; Henry, Asegun Journal of Applied Physics, Vol. 121, Issue 2 https://doi.org/10.1063/1.4973573	journal	January 2017
Isotope scattering of dispersive phonons in Ge Tamura, Shin-ichiro Physical Review B, Vol. 27, Issue 2 https://doi.org/10.1103/PhysRevB.27.858	journal	January 1983
The Channeling of Energetic Atoms in Crystal Lattices Robinson, Mark T.; Oen, O. S. Applied Physics Letters, Vol. 2, Issue 2 https://doi.org/10.1063/1.1753757	journal	January 1963
Thermal conductivity measurement from 30 to 750 K: the 3ω method Cahill, David G. Review of Scientific Instruments, Vol. 61, Issue 2 https://doi.org/10.1063/1.1141498	journal	February 1990
Epitaxial regrowth of Ne‐ and Kr‐implanted amorphous silicon Wittmer, M.; Roth, J.; Revesz, P. Journal of Applied Physics, Vol. 49, Issue 10 https://doi.org/10.1063/1.324416	journal	October 1978
Modified effective medium formulation for the thermal conductivity of nanocomposites Minnich, Austin; Chen, Gang Applied Physics Letters, Vol. 91, Issue 7 https://doi.org/10.1063/1.2771040	journal	August 2007
Thermal conductivity measurements of non-metals via combined time- and frequency-domain thermoreflectance without a metal film transducer Wang, L.; Cheaito, R.; Braun, J. L. Review of Scientific Instruments, Vol. 87, Issue 9 https://doi.org/10.1063/1.4962711	journal	September 2016
Damage profile and ion distribution of slow heavy ions in compounds Zhang, Yanwen; Bae, In-Tae; Sun, Kai Journal of Applied Physics, Vol. 105, Issue 10 https://doi.org/10.1063/1.3118582	journal	May 2009
Enhanced thermoelectric performance of rough silicon nanowires Hochbaum, Allon I.; Chen, Renkun; Delgado, Raul Diaz Nature, Vol. 451, Issue 7175, p. 163-167 https://doi.org/10.1038/nature06381	journal	January 2008
Reductions in the thermal conductivity of irradiated silicon governed by displacement damage Scott, Ethan A.; Hattar, Khalid; Lang, Eric J. Physical Review B, Vol. 104, Issue 13 https://doi.org/10.1103/PhysRevB.104.134306	journal	October 2021
A steady-state thermoreflectance method to measure thermal conductivity Braun, Jeffrey L.; Olson, David H.; Gaskins, John T. Review of Scientific Instruments, Vol. 90, Issue 2 https://doi.org/10.1063/1.5056182	journal	February 2019
Scattering of phonons by vacancies Ratsifaritana, C. A.; Klemens, P. G. International Journal of Thermophysics, Vol. 8, Issue 6 https://doi.org/10.1007/BF00500791	journal	November 1987
High energy ion implantation Ziegler, J. F. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 6, Issue 1-2 https://doi.org/10.1016/0168-583X(85)90645-7	journal	January 1985
Modification of SRIM-calculated dose and injected ion profiles due to sputtering, injected ion buildup and void swelling Wang, Jing; Toloczko, Mychailo B.; Bailey, Nathan Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 387 https://doi.org/10.1016/j.nimb.2016.09.015	journal	November 2016
Reduction in thermal conductivity and tunable heat capacity of inorganic/organic hybrid superlattices Giri, Ashutosh; Niemelä, Janne-Petteri; Szwejkowski, Chester J. Physical Review B, Vol. 93, Issue 2 https://doi.org/10.1103/PhysRevB.93.024201	journal	January 2016
Thermal conductance of strongly bonded metal-oxide interfaces Wilson, R. B.; Apgar, Brent A.; Hsieh, Wen-Pin Physical Review B, Vol. 91, Issue 11 https://doi.org/10.1103/PhysRevB.91.115414	journal	March 2015
A frequency-domain thermoreflectance method for the characterization of thermal properties Schmidt, Aaron J.; Cheaito, Ramez; Chiesa, Matteo Review of Scientific Instruments, Vol. 80, Issue 9 https://doi.org/10.1063/1.3212673	journal	September 2009
Effects of point defects on thermal and thermoelectric properties of InN Levander, A. X.; Tong, T.; Yu, K. M. Applied Physics Letters, Vol. 98, Issue 1 https://doi.org/10.1063/1.3536507	journal	January 2011
Experimental Investigation of Size Effects on the Thermal Conductivity of Silicon-Germanium Alloy Thin Films Cheaito, Ramez; Duda, John C.; Beechem, Thomas E. Physical Review Letters, Vol. 109, Issue 19 https://doi.org/10.1103/PhysRevLett.109.195901	journal	November 2012
Probing anisotropic heat transport using time-domain thermoreflectance with offset laser spots Feser, Joseph P.; Cahill, David G. Review of Scientific Instruments, Vol. 83, Issue 10 https://doi.org/10.1063/1.4757863	journal	October 2012
Formation of Amorphous Silicon by Ion Bombardment as a Function of Ion, Temperature, and Dose Morehead, F. F.; Crowder, B. L.; Title, R. S. Journal of Applied Physics, Vol. 43, Issue 3 https://doi.org/10.1063/1.1661223	journal	March 1972
Upper limit to the thermal penetration depth during modulated heating of multilayer thin films with pulsed and continuous wave lasers: A numerical study Braun, Jeffrey L.; Hopkins, Patrick E. Journal of Applied Physics, Vol. 121, Issue 17 https://doi.org/10.1063/1.4982915	journal	May 2017
Ion beams in silicon processing and characterization Chason, E.; Picraux, S. T.; Poate, J. M. Journal of Applied Physics, Vol. 81, Issue 10 https://doi.org/10.1063/1.365193	journal	May 1997
Understanding the local thermal conductivity evolution of neutron irradiated U3Si2 dispersion fuel via state-of-the-art thermo-reflectance measurements Pavlov, T. R.; Middlemas, S. C.; Miller, B. D. Journal of Nuclear Materials, Vol. 557 https://doi.org/10.1016/j.jnucmat.2021.153280	journal	December 2021
Ion-beam-induced amorphization and recrystallization in silicon Pelaz, Lourdes; Marqués, Luis A.; Barbolla, Juan Journal of Applied Physics, Vol. 96, Issue 11 https://doi.org/10.1063/1.1808484	journal	December 2004
Ion-beam amorphization of semiconductors: A physical model based on the amorphous pocket population Mok, K. R. C.; Jaraiz, M.; Martin-Bragado, I. Journal of Applied Physics, Vol. 98, Issue 4 https://doi.org/10.1063/1.2014940	journal	August 2005
Thermal conductivity of amorphous silicon thin films Moon, Seungjae; Hatano, Mutsuko; Lee, Minghong International Journal of Heat and Mass Transfer, Vol. 45, Issue 12 https://doi.org/10.1016/S0017-9310(01)00347-7	journal	June 2002
Heat-Transport Mechanisms in Superlattices Koh, Yee Kan; Cao, Yu; Cahill, David G. Advanced Functional Materials, Vol. 19, Issue 4 https://doi.org/10.1002/adfm.200800984	journal	February 2009
Effect of ion irradiation on the thermal conductivity of UO2 and U3O8 epitaxial layers Weisensee, Patricia B.; Feser, Joseph P.; Cahill, David G. Journal of Nuclear Materials, Vol. 443, Issue 1-3 https://doi.org/10.1016/j.jnucmat.2013.07.021	journal	November 2013
On the Steady-State Temperature Rise During Laser Heating of Multilayer Thin Films in Optical Pump–Probe Techniques Braun, Jeffrey L.; Szwejkowski, Chester J.; Giri, Ashutosh Journal of Heat Transfer, Vol. 140, Issue 5 https://doi.org/10.1115/1.4038713	journal	February 2018
Orders of magnitude reduction in the thermal conductivity of polycrystalline diamond through carbon, nitrogen, and oxygen ion implantation Scott, Ethan A.; Hattar, Khalid; Braun, Jeffrey L. Carbon, Vol. 157 https://doi.org/10.1016/j.carbon.2019.09.076	journal	February 2020
Thermal conductivity of individual silicon nanowires Li, Deyu; Wu, Yiying; Kim, Philip Applied Physics Letters, Vol. 83, Issue 14, p. 2934-2936 https://doi.org/10.1063/1.1616981	journal	October 2003
Charge-Induced Disorder Controls the Thermal Conductivity of Entropy-Stabilized Oxides Braun, Jeffrey L.; Rost, Christina M.; Lim, Mina Advanced Materials, Vol. 30, Issue 51 https://doi.org/10.1002/adma.201805004	journal	October 2018
Anisotropic failure of Fourier theory in time-domain thermoreflectance experiments Wilson, R. B.; Cahill, David G. Nature Communications, Vol. 5, Issue 1 https://doi.org/10.1038/ncomms6075	journal	October 2014

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