Erosion of Extraction Electrodes of Ion Sources due to Sputtering

Journal Article · Fri Jan 07 00:00:00 EST 2011 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.3548405· OSTI ID:21510110

Kenmotsu, Takahiro; Wada, Motoi ^[1]; Miyamoto, Naoki ^[2]

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1. Doshisha University Kyotanabe, Kyoto, 610-0394 (Japan)
2. Nissin Ion Equipment Co. Ltd, Minamiku, Kyoto, 610-0332 (Japan)

The effects upon erosion due to implanted atoms in extraction electrodes of an ion source have been investigated through calculating the sputtering yields with a Monte Carlo simulation code, ACAT. The results obtained with ACAT have indicated that the sputtering yields of extraction electrodes are substantially affected by the retention of implanted atoms depending upon the mass ratio of electrode materials and extracted ions from the source plasma. The enhanced erosion takes place as the heavier ion beam species like phosphor is implanted into lighter electrode material like carbon. Additional mixing of materials arising from ion source operation, such as hot cathode materials evaporation onto a carbon extraction electrode, can shorten the lifetime of the extraction electrodes.

• OSTI ID: 21510110
• Journal Information: AIP Conference Proceedings, Vol. 1321, Issue 1; Conference: IIT 2010: 18. international conference on ion implantation technology, Kyoto (Japan), 6-11 Jun 2010; Other Information: DOI: 10.1063/1.3548405; (c) 2010 American Institute of Physics; ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ATOMS
BEAMS
BINDING ENERGY
CARBON
CATHODES
COMPUTERIZED SIMULATION
EROSION
EVAPORATION
EXTRACTION
HEAVY IONS
ION SOURCES
LIFETIME
MASS
MIXING
MONTE CARLO METHOD
PLASMA
RETENTION
SPUTTERING
CALCULATION METHODS
CHARGED PARTICLES
ELECTRODES
ELEMENTS
ENERGY
IONS
NONMETALS
PHASE TRANSFORMATIONS
SEPARATION PROCESSES
SIMULATION