Projection phase contrast microscopy with a hard x-ray nanofocused beam: Defocus and contrast transfer

Journal Article · Fri May 01 00:00:00 EDT 2009 · Physical Review. B, Condensed Matter and Materials Physics

DOI:https://doi.org/10.1103/PHYSREVB.79.184112· OSTI ID:21287011

Salditt, T; Giewekemeyer, K; Fuhse, C; Krueger, S P ^[1]; Tucoulou, R; Cloetens, P ^[2]

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1. Institut fuer Roentgenphysik, Universitaet Goettingen, Friedrich-Hund-Platz 1, 37077 Goettingen (Germany)
2. ESRF, BP 220, 38043 Grenoble (France)

We report a projection phase contrast microscopy experiment using hard x-ray pink beam undulator radiation focused by an adaptive mirror system to 100-200 nm spot size. This source is used to illuminate a lithographic test pattern with a well-controlled range of spatial frequencies. The oscillatory nature of the contrast transfer function with source-to-sample distance in this holographic imaging scheme is quantified and the validity of the weak phase object approximation is confirmed for the experimental conditions.

• OSTI ID: 21287011
• Journal Information: Physical Review. B, Condensed Matter and Materials Physics, Vol. 79, Issue 18; Other Information: DOI: 10.1103/PhysRevB.79.184112; (c) 2009 The American Physical Society; Country of input: International Atomic Energy Agency (IAEA); ISSN 1098-0121
• Country of Publication: United States
• Language: English

Related Subjects

77 NANOSCIENCE AND NANOTECHNOLOGY
99 GENERAL AND MISCELLANEOUS//MATHEMATICS, COMPUTING, AND INFORMATION SCIENCE
APPROXIMATIONS
BEAMS
HARD X RADIATION
HOLOGRAPHY
MICROSCOPY
NANOSTRUCTURES
TRANSFER FUNCTIONS
WIGGLER MAGNETS