Microfabrication of plastic-PDMS microfluidic devices using polyimide release layer and selective adhesive bonding
Abstract
In this study, we present an improved method to bond poly(dimethylsiloxane) (PDMS) with polyimide (PI) to develop flexible substrate microfluidic devices. The PI film was separately fabricated on a silicon wafer by spin coating followed by thermal treatment to avoid surface unevenness of the flexible substrate. In this way, we could also integrate flexible substrate into standard micro-electromechanical systems (MEMS) fabrication. Meanwhile, the adhesive epoxy was selectively transferred to the PDMS microfluidic device by a stamp-and-stick method to avoid epoxy clogging the microfluidic channels. To spread out the epoxy evenly on the transferring substrate, we used superhydrophilic vanadium oxide film coated glass as the transferring substrate. After the bonding process, the flexible substrate could easily be peeled off from the rigid substrate. Contact angle measurement was used to characterize the hydrophicity of the vanadium oxide film. X-ray photoelectron spectroscopy analysis was conducted to study the surface of the epoxy. We further evaluated the bonding quality by peeling tests, which showed a maximum bonding strength of 100 kPa. By injecting with black ink, the plastic microfluidic device was confirmed to be well bonded with no leakage for a day under 1 atm. Finally, this proposed versatile method could bond the microfluidicmore »
- Authors:
-
- Stony Brook Univ., NY (United States)
- Virginia Polytechnic Inst. and State Univ. (Virginia Tech), Blacksburg, VA (United States)
- Brookhaven National Lab. (BNL), Upton, NY (United States)
- Publication Date:
- Research Org.:
- Virginia Polytechnic Inst. and State Univ. (Virginia Tech), Blacksburg, VA (United States); Brookhaven National Laboratory (BNL), Upton, NY (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC); National Science Foundation (NSF); AbbVie Inc. (United States)
- OSTI Identifier:
- 1392268
- Report Number(s):
- BNL-114324-2017-JA
Journal ID: ISSN 0960-1317; KC0403020
- Grant/Contract Number:
- SC0012704; IDBR-1530508
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Journal of Micromechanics and Microengineering. Structures, Devices and Systems
- Additional Journal Information:
- Journal Volume: 27; Journal Issue: 5; Journal ID: ISSN 0960-1317
- Publisher:
- IOP Publishing
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING; microfluidic device; flexible substrate; polyimide (PI); polydimethylsiloxane (PDMS); adhesive bonding; superhydrophilic; stamp-and-stick; Center for Functional Nanomaterials
Citation Formats
Wang, Shuyu, Yu, Shifeng, Lu, Ming, and Zuo, Lei. Microfabrication of plastic-PDMS microfluidic devices using polyimide release layer and selective adhesive bonding. United States: N. p., 2017.
Web. doi:10.1088/1361-6439/aa66ed.
Wang, Shuyu, Yu, Shifeng, Lu, Ming, & Zuo, Lei. Microfabrication of plastic-PDMS microfluidic devices using polyimide release layer and selective adhesive bonding. United States. https://doi.org/10.1088/1361-6439/aa66ed
Wang, Shuyu, Yu, Shifeng, Lu, Ming, and Zuo, Lei. Wed .
"Microfabrication of plastic-PDMS microfluidic devices using polyimide release layer and selective adhesive bonding". United States. https://doi.org/10.1088/1361-6439/aa66ed. https://www.osti.gov/servlets/purl/1392268.
@article{osti_1392268,
title = {Microfabrication of plastic-PDMS microfluidic devices using polyimide release layer and selective adhesive bonding},
author = {Wang, Shuyu and Yu, Shifeng and Lu, Ming and Zuo, Lei},
abstractNote = {In this study, we present an improved method to bond poly(dimethylsiloxane) (PDMS) with polyimide (PI) to develop flexible substrate microfluidic devices. The PI film was separately fabricated on a silicon wafer by spin coating followed by thermal treatment to avoid surface unevenness of the flexible substrate. In this way, we could also integrate flexible substrate into standard micro-electromechanical systems (MEMS) fabrication. Meanwhile, the adhesive epoxy was selectively transferred to the PDMS microfluidic device by a stamp-and-stick method to avoid epoxy clogging the microfluidic channels. To spread out the epoxy evenly on the transferring substrate, we used superhydrophilic vanadium oxide film coated glass as the transferring substrate. After the bonding process, the flexible substrate could easily be peeled off from the rigid substrate. Contact angle measurement was used to characterize the hydrophicity of the vanadium oxide film. X-ray photoelectron spectroscopy analysis was conducted to study the surface of the epoxy. We further evaluated the bonding quality by peeling tests, which showed a maximum bonding strength of 100 kPa. By injecting with black ink, the plastic microfluidic device was confirmed to be well bonded with no leakage for a day under 1 atm. Finally, this proposed versatile method could bond the microfluidic device and plastic substrate together and be applied in the fabrication of some biosensors and lab-on-a-chip systems.},
doi = {10.1088/1361-6439/aa66ed},
journal = {Journal of Micromechanics and Microengineering. Structures, Devices and Systems},
number = 5,
volume = 27,
place = {United States},
year = {Wed Mar 15 00:00:00 EDT 2017},
month = {Wed Mar 15 00:00:00 EDT 2017}
}
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Works referenced in this record:
Photolithographic surface micromachining of polydimethylsiloxane (PDMS)
journal, January 2012
- Chen, Weiqiang; Lam, Raymond H. W.; Fu, Jianping
- Lab Chip, Vol. 12, Issue 2
An ultra-thin PDMS membrane as a bio/micro–nano interface: fabrication and characterization
journal, May 2007
- Thangawng, Abel L.; Ruoff, Rodney S.; Swartz, Melody A.
- Biomedical Microdevices, Vol. 9, Issue 4
An effective PDMS microfluidic chip for chemiluminescence detection of cobalt (II) in water
journal, June 2012
- Chen, Xueye; Liu, Chong; Xu, Zheng
- Microsystem Technologies, Vol. 19, Issue 1
Selective stamp bonding of PDMS microfluidic devices to polymer substrates for biological applications
journal, April 2013
- Li, Xiang; Wu, Nianqiang; Rojanasakul, Yon
- Sensors and Actuators A: Physical, Vol. 193
A facile route for irreversible bonding of plastic-PDMS hybrid microdevices at room temperature
journal, January 2010
- Tang, Linzhi; Lee, Nae Yoon
- Lab on a Chip, Vol. 10, Issue 10
Simple room temperature bonding of thermoplastics and poly(dimethylsiloxane)
journal, January 2011
- Sunkara, Vijaya; Park, Dong-Kyu; Hwang, Hyundoo
- Lab Chip, Vol. 11, Issue 5
Replica multichannel polymer chips with a network of sacrificial channels sealed by adhesive printing method
journal, January 2005
- Dang, F.; Shinohara, S.; Tabata, O.
- Lab on a Chip, Vol. 5, Issue 4
A flexible electrochemical micro lab-on-chip: application to the detection of interleukin-10
journal, April 2016
- Baraket, Abdoullatif; Lee, Michael; Zine, Nadia
- Microchimica Acta, Vol. 183, Issue 7
Micro-differential scanning calorimeter for liquid biological samples
journal, October 2016
- Wang, Shuyu; Yu, Shifeng; Siedler, Michael S.
- Review of Scientific Instruments, Vol. 87, Issue 10
Poly(pyrrole) microwires fabrication process on flexible thermoplastics polymers: Application as a biosensing material
journal, December 2015
- Garcia-Cruz, Alvaro; Lee, Michael; Zine, Nadia
- Sensors and Actuators B: Chemical, Vol. 221
WEAR BEHAVIOR OF NANOSTRUCTURED HYPOEUTECTIC Fe–B ALLOY
journal, January 2017
- Fu, Licai; Yang, Jun; Zhou, Lingping
- Surface Review and Letters, Vol. 24, Issue 02
Poly(dimethylsiloxane)-polyimide blends in the formation of thick polyimide films
journal, December 2006
- Matienzo, L. J.; Egitto, F. D.
- Journal of Materials Science, Vol. 42, Issue 1
Lab-on-a-Foil: microfluidics on thin and flexible films
journal, January 2010
- Focke, Maximilian; Kosse, Dominique; Müller, Claas
- Lab on a Chip, Vol. 10, Issue 11
Optimization of Silica Silanization by 3-Aminopropyltriethoxysilane
journal, December 2006
- Howarter, John A.; Youngblood, Jeffrey P.
- Langmuir, Vol. 22, Issue 26
Development of a flexible microfluidic system based on a simple and reproducible sealing process between polymers and poly(dimethylsiloxane)
journal, November 2013
- Baraket, Abdoullatif; Zine, Nadia; Lee, Michael
- Microelectronic Engineering, Vol. 111
Stamp-and-stick room-temperature bonding technique for microdevices
journal, April 2005
- Satyanarayana, S.; Karnik, R. N.; Majumdar, A.
- Journal of Microelectromechanical Systems, Vol. 14, Issue 2
Light-induced amphiphilic surfaces
journal, July 1997
- Wang, Rong; Hashimoto, Kazuhito; Fujishima, Akira
- Nature, Vol. 388, Issue 6641
Flexible substrate and release layer for flexible MEMS devices
journal, September 2013
- Ahmed, Moinuddin; Butler, Donald P.
- Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, Vol. 31, Issue 5
Works referencing / citing this record:
Nanocalorimeters for biomolecular analysis and cell metabolism monitoring
journal, January 2020
- Wang, Shuyu; Sha, Xiaopeng; Yu, Shifeng
- Biomicrofluidics, Vol. 14, Issue 1