Search Menu
DOE PAGES title logo U.S. Department of Energy
Office of Scientific and Technical Information
Search Scholarly Publications

Title: One-dimensional time-dependent fluid model of a very high density low-pressure inductively coupled plasma

Abstract

A time-dependent two-fluid model has been developed to understand axial variations in the plasma parameters in a very high density (peak ne~ > 5x1019 m–3) argon inductively coupled discharge in a long 1.1 cm radius tube. The model equations are written in 1D, with radial losses to the tube walls accounted for by the inclusion of effective particle and energy sink terms. The ambipolar diffusion equation and electron energy equation are solved to find the electron density ne(z,t) and temperature Te(z,t), and the populations of the neutral argon 4s metastable, 4s resonant, and 4p excited state manifolds are calculated in order to determine the stepwise ionization rate and calculate radiative energy losses. The model has been validated through comparisons with Langmuir probe ion saturation current measurements; close agreement between the simulated and measured axial plasma density profiles and the initial density rise rate at each location was obtained at pAr = 30-60 mTorr. Lastly, we present detailed results from calculations at 60 mTorr, including the time-dependent electron temperature, excited state populations, and energy budget within and downstream of the radiofrequency (RF) antenna.

Authors:
ORCiD logo [1]; ORCiD logo [1]
+ Show Author Affiliations
  1. California Inst. of Technology (CalTech), Pasadena, CA (United States)
Publication Date:
Research Org.:
California Institute of Technology (CalTech), Pasadena, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1236697
Alternate Identifier(s):
OSTI ID: 1234030
Grant/Contract Number:  
SC0010471; FG02-04ER54755
Resource Type:
Accepted Manuscript
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 118; Journal Issue: 24; Journal ID: ISSN 0021-8979
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; inductively coupled plasma; two-fluid model; atomic model; plasma transport; argon; antennas; ionization; excited states; diffusion; experiment design

Citation Formats

Chaplin, Vernon H., and Bellan, Paul M. One-dimensional time-dependent fluid model of a very high density low-pressure inductively coupled plasma. United States: N. p., 2015. Web. doi:10.1063/1.4938490.
Copy to clipboard
Chaplin, Vernon H., & Bellan, Paul M. One-dimensional time-dependent fluid model of a very high density low-pressure inductively coupled plasma. United States. https://doi.org/10.1063/1.4938490
Copy to clipboard
Chaplin, Vernon H., and Bellan, Paul M. Mon . "One-dimensional time-dependent fluid model of a very high density low-pressure inductively coupled plasma". United States. https://doi.org/10.1063/1.4938490. https://www.osti.gov/servlets/purl/1236697.
Copy to clipboard
@article{osti_1236697,
title = {One-dimensional time-dependent fluid model of a very high density low-pressure inductively coupled plasma},
author = {Chaplin, Vernon H. and Bellan, Paul M.},
abstractNote = {A time-dependent two-fluid model has been developed to understand axial variations in the plasma parameters in a very high density (peak ne~ > 5x1019 m–3) argon inductively coupled discharge in a long 1.1 cm radius tube. The model equations are written in 1D, with radial losses to the tube walls accounted for by the inclusion of effective particle and energy sink terms. The ambipolar diffusion equation and electron energy equation are solved to find the electron density ne(z,t) and temperature Te(z,t), and the populations of the neutral argon 4s metastable, 4s resonant, and 4p excited state manifolds are calculated in order to determine the stepwise ionization rate and calculate radiative energy losses. The model has been validated through comparisons with Langmuir probe ion saturation current measurements; close agreement between the simulated and measured axial plasma density profiles and the initial density rise rate at each location was obtained at pAr = 30-60 mTorr. Lastly, we present detailed results from calculations at 60 mTorr, including the time-dependent electron temperature, excited state populations, and energy budget within and downstream of the radiofrequency (RF) antenna.},
doi = {10.1063/1.4938490},
journal = {Journal of Applied Physics},
number = 24,
volume = 118,
place = {United States},
year = {Mon Dec 28 00:00:00 EST 2015},
month = {Mon Dec 28 00:00:00 EST 2015}
}
Copy to clipboard
Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
https://doi.org/10.1063/1.4938490
Copyright Statement
Other availability
Search WorldCat Search WorldCat to find libraries that may hold this journal
Citation Metrics:
Cited by: 4 works
Citation information provided by
Web of Science
Save / Share:
Export Metadata
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.

Works referenced in this record:

Principles of Plasma Discharges and Materials Processing
book, January 2005

Pulsed high-density plasmas for advanced dry etching processes
journal, July 2012

  • Banna, Samer; Agarwal, Ankur; Cunge, Gilles
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 30, Issue 4
  • DOI: 10.1116/1.4716176

Spatially averaged (global) model of time modulated high density argon plasmas
journal, September 1995

  • Ashida, Sumio; Lee, C.; Lieberman, M. A.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 13, Issue 5
  • DOI: 10.1116/1.579494

Effect of multistep ionizations on the electron temperature in an argon inductively coupled plasma
journal, September 2005

  • Lee, Min-Hyong; Chung, Chin-Wook
  • Applied Physics Letters, Vol. 87, Issue 13
  • DOI: 10.1063/1.2056592

Pulsed-power plasma reactors: two-dimensional electropositive discharge simulation in a GEC reference cell
journal, July 2002

Two-dimensional modeling of long-term transients in inductively coupled plasmas using moderate computational parallelism. I. Ar pulsed plasmas
journal, March 2002

  • Subramonium, Pramod; Kushner, Mark J.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 20, Issue 2
  • DOI: 10.1116/1.1434964

Pulsed plasmas as a method to improve uniformity during materials processing
journal, July 2004

  • Subramonium, Pramod; Kushner, Mark J.
  • Journal of Applied Physics, Vol. 96, Issue 1
  • DOI: 10.1063/1.1751636

Rapid two‐dimensional self‐consistent simulation of inductively coupled plasma and comparison with experimental data
journal, April 1996

  • Wise, Richard S.; Lymberopoulos, Dimitris P.; Economou, Demetre J.
  • Applied Physics Letters, Vol. 68, Issue 18
  • DOI: 10.1063/1.115834

On the jets, kinks, and spheromaks formed by a planar magnetized coaxial gun
journal, March 2005

  • Hsu, S. C.; Bellan, P. M.
  • Physics of Plasmas, Vol. 12, Issue 3
  • DOI: 10.1063/1.1850921

Battery-powered pulsed high density inductively coupled plasma source for pre-ionization in laboratory astrophysics experiments
journal, July 2015

  • Chaplin, Vernon H.; Bellan, Paul M.
  • Review of Scientific Instruments, Vol. 86, Issue 7
  • DOI: 10.1063/1.4926544

Fluid simulation of a pulsed-power inductively coupled argon plasma
journal, March 1998

  • Lymberopoulos, D. P.; Kolobov, V. I.; Economou, D. J.
  • Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 16, Issue 2
  • DOI: 10.1116/1.581072

Effect of gas heating on the spatial structure of a traveling wave sustained Ar discharge
journal, November 2001

  • Henriques, J.; Tatarova, E.; Dias, F. M.
  • Journal of Applied Physics, Vol. 90, Issue 10
  • DOI: 10.1063/1.1407846

Plasma production by helicon waves
journal, February 1993

Recombination and enhanced metastable repopulation in the argon afterglow
journal, May 2012

Fundamentals of Plasma Physics
book, January 2006

Two-dimensional cylindrical plasma for intermediate gas pressures
journal, January 2011

Unified one-dimensional model of bounded plasma with nonzero ion temperature in a broad pressure range
journal, March 2013

  • Palacio Mizrahi, J. H.; Gurovich, V. Tz.; Krasik, Ya. E.
  • Physics of Plasmas, Vol. 20, Issue 3
  • DOI: 10.1063/1.4798401

Edge-to-center density ratios in low-temperature plasmas
journal, March 2015

Downstream physics of the helicon discharge
journal, May 1996

  • Chen, Francis F.; Sudit, Isaac D.; Light, Max
  • Plasma Sources Science and Technology, Vol. 5, Issue 2
  • DOI: 10.1088/0963-0252/5/2/009

Self-consistent global model with multi-step ionizations in inductively coupled plasmas
journal, July 2005

  • Lee, Min-Hyong; Chung, Chin-Wook
  • Physics of Plasmas, Vol. 12, Issue 7
  • DOI: 10.1063/1.1935407

Instantaneous Direct‐Display System of Plasma Parameters by Means of Triple Probe
journal, August 1965

  • Chen, Sin‐Li; Sekiguchi, T.
  • Journal of Applied Physics, Vol. 36, Issue 8
  • DOI: 10.1063/1.1714492
    Sort by:
    [ × clear filter / sort ]

    Works referencing / citing this record:

    Metastables as a probe for low-temperature plasma characteristics in argon
    journal, March 2019

      Sort by:
      [ × clear filter / sort ]

      Similar Records in DOE PAGES and OSTI.GOV collections: