Heterogeneous microring and Mach-Zehnder modulators based on lithium niobate and chalcogenide glasses on silicon
Abstract
In this study, thin films of lithium niobate are wafer bonded onto silicon substrates and rib-loaded with a chalcogenide glass, Ge23Sb7S70, to demonstrate strongly confined single-mode submicron waveguides, microring modulators, and Mach-Zehnder modulators in the telecom C band. The 200 μm radii microring modulators present 1.2 dB/cm waveguide propagation loss, 1.2 × 105 quality factor, 0.4 GHz/V tuning rate, and 13 dB extinction ratio. The 6 mm long Mach-Zehnder modulators have a half-wave voltage-length product of 3.8 V.cm and an extinction ratio of 15 dB. The demonstrated work is a key step towards enabling wafer scale dense on-chip integration of high performance lithium niobate electro-optical devices on silicon for short reach optical interconnects and higher order advanced modulation schemes.
- Authors:
-
- Univ. of Central Florida, Orlando, FL (United States)
- Partow Technologies LLC, Orlando, FL (United States)
- Univ. of Central Florida, Orlando, FL (United States); Clemson Univ., Clemson, SC (United States)
- Publication Date:
- Research Org.:
- Partow Technologies LLC, Orlando, FL (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC)
- OSTI Identifier:
- 1224859
- Grant/Contract Number:
- SC0013245
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Optics Express
- Additional Journal Information:
- Journal Volume: 23; Journal Issue: 17; Journal ID: ISSN 1094-4087
- Publisher:
- Optical Society of America (OSA)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING; integrated optics; modulators; lithium niobate; optoelectronics; integrated optoelectronic circuits
Citation Formats
Rao, Ashutosh, Patil, Aniket, Chiles, Jeff, Malinowski, Marcin, Novak, Spencer, Richardson, Kathleen, Rabiei, Payam, and Fathpour, Sasan. Heterogeneous microring and Mach-Zehnder modulators based on lithium niobate and chalcogenide glasses on silicon. United States: N. p., 2015.
Web. doi:10.1364/OE.23.022746.
Rao, Ashutosh, Patil, Aniket, Chiles, Jeff, Malinowski, Marcin, Novak, Spencer, Richardson, Kathleen, Rabiei, Payam, & Fathpour, Sasan. Heterogeneous microring and Mach-Zehnder modulators based on lithium niobate and chalcogenide glasses on silicon. United States. https://doi.org/10.1364/OE.23.022746
Rao, Ashutosh, Patil, Aniket, Chiles, Jeff, Malinowski, Marcin, Novak, Spencer, Richardson, Kathleen, Rabiei, Payam, and Fathpour, Sasan. Thu .
"Heterogeneous microring and Mach-Zehnder modulators based on lithium niobate and chalcogenide glasses on silicon". United States. https://doi.org/10.1364/OE.23.022746. https://www.osti.gov/servlets/purl/1224859.
@article{osti_1224859,
title = {Heterogeneous microring and Mach-Zehnder modulators based on lithium niobate and chalcogenide glasses on silicon},
author = {Rao, Ashutosh and Patil, Aniket and Chiles, Jeff and Malinowski, Marcin and Novak, Spencer and Richardson, Kathleen and Rabiei, Payam and Fathpour, Sasan},
abstractNote = {In this study, thin films of lithium niobate are wafer bonded onto silicon substrates and rib-loaded with a chalcogenide glass, Ge23Sb7S70, to demonstrate strongly confined single-mode submicron waveguides, microring modulators, and Mach-Zehnder modulators in the telecom C band. The 200 μm radii microring modulators present 1.2 dB/cm waveguide propagation loss, 1.2 × 105 quality factor, 0.4 GHz/V tuning rate, and 13 dB extinction ratio. The 6 mm long Mach-Zehnder modulators have a half-wave voltage-length product of 3.8 V.cm and an extinction ratio of 15 dB. The demonstrated work is a key step towards enabling wafer scale dense on-chip integration of high performance lithium niobate electro-optical devices on silicon for short reach optical interconnects and higher order advanced modulation schemes.},
doi = {10.1364/OE.23.022746},
journal = {Optics Express},
number = 17,
volume = 23,
place = {United States},
year = {Thu Aug 20 00:00:00 EDT 2015},
month = {Thu Aug 20 00:00:00 EDT 2015}
}
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