Near field optical scanning system employing microfabricated solid immersion lens

Cozier, Kenneth B; Fletcher, Daniel A; Kino, Gordon S; Quate, Calvin F; Soh, Hyongsok T

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A - human necessities
A01 - agriculture
A21 - baking
A22 - butchering
A23 - foods or foodstuffs
A24 - tobacco
A41 - wearing apparel
A42 - headwear
A43 - footwear
A44 - haberdashery
A45 - hand or travelling articles
A46 - brushware
A47 - furniture
A61 - medical or veterinary science
A62 - life-saving
A63 - sports
A99 - subject matter not otherwise provided for in this section
B - performing operations
B01 - physical or chemical processes or apparatus in general
B02 - crushing, pulverising, or disintegrating
B03 - separation of solid materials using liquids or using pneumatic tables or jigs
B04 - centrifugal apparatus or machines for carrying-out physical or chemical processes
B05 - spraying or atomising in general
B06 - generating or transmitting mechanical vibrations in general
B07 - separating solids from solids
B08 - cleaning
B09 - disposal of solid waste
B21 - mechanical metal-working without essentially removing material
B22 - casting
B23 - machine tools
B24 - grinding
B25 - hand tools
B26 - hand cutting tools
B27 - working or preserving wood or similar material
B28 - working cement, clay, or stone
B29 - working of plastics
B30 - presses
B31 - making articles of paper, cardboard or material worked in a manner analogous to paper
B32 - layered products
B33 - additive manufacturing technology
B41 - printing
B42 - bookbinding
B43 - writing or drawing implements
B44 - decorative arts
B60 - vehicles in general
B61 - railways
B62 - land vehicles for travelling otherwise than on rails
B63 - ships or other waterborne vessels
B64 - aircraft
B65 - conveying
B66 - hoisting
B67 - opening, closing {or cleaning} bottles, jars or similar containers
B68 - saddlery
B81 - microstructural technology
B82 - nanotechnology
B99 - subject matter not otherwise provided for in this section
C - chemistry
C01 - inorganic chemistry
C02 - treatment of water, waste water, sewage, or sludge
C03 - glass
C04 - cements
C05 - fertilisers
C06 - explosives
C07 - organic chemistry
C08 - organic macromolecular compounds
C09 - dyes
C10 - petroleum, gas or coke industries
C11 - animal or vegetable oils, fats, fatty substances or waxes
C12 - biochemistry
C13 - sugar industry
C14 - skins
C21 - metallurgy of iron
C22 - metallurgy
C23 - coating metallic material
C25 - electrolytic or electrophoretic processes
C30 - crystal growth
C40 - combinatorial technology
C99 - subject matter not otherwise provided for in this section
D - textiles
D01 - natural or man-made threads or fibres
D02 - yarns
D03 - weaving
D04 - braiding
D05 - sewing
D06 - treatment of textiles or the like
D07 - ropes
D10 - indexing scheme associated with sublasses of section d, relating to textiles
D21 - paper-making
D99 - subject matter not otherwise provided for in this section
E - fixed constructions
E01 - construction of roads, railways, or bridges
E02 - hydraulic engineering
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E04 - building
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E06 - doors, windows, shutters, or roller blinds in general
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F - mechanical engineering
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F03 - machines or engines for liquids
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F22 - steam generation
F23 - combustion apparatus
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F26 - drying
F27 - furnaces
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F42 - ammunition
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G - physics
G01 - measuring
G02 - optics
G03 - photography
G04 - horology
G05 - controlling
G06 - computing
G07 - checking-devices
G08 - signalling
G09 - education
G10 - musical instruments
G11 - information storage
G12 - instrument details
G16 - information and communication technology [ict] specially adapted for specific application fields
G21 - nuclear physics
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H - electricity
H01 - basic electric elements
H02 - generation
H03 - basic electronic circuitry
H04 - electric communication technique
H05 - electric techniques not otherwise provided for
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Y - new / cross sectional technologies
Y02 - technologies or applications for mitigation or adaptation against climate change
Y04 - information or communication technologies having an impact on other technology areas
Y10 - technical subjects covered by former uspc

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Title: Near field optical scanning system employing microfabricated solid immersion lens

Abstract

A solid immersion lens integrated on a flexible support such as a cantilever or membrane is described, together with a method of forming the integrated structure.

Inventors:

Cozier, Kenneth B ^[1]; Fletcher, Daniel A ^[2]; Kino, Gordon S ^[1]; Quate, Calvin F ^[1]; Soh, Hyongsok T ^[1]

Stanford, CA
Menlo Park, CA

Issue Date:: Tue Jan 01 00:00:00 EST 2002

Research Org.:: Stanford Univ., CA (United States)

OSTI Identifier:: 874687

Patent Number(s):: 6441359

Application Number:: 09/414674

Assignee:: The Board of Trustees of the Leland Stanford Junior University (Palo Alto, CA)

Patent Classifications (CPCs):: B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES

G - PHYSICS G01 - MEASURING G01Q - SCANNING-PROBE TECHNIQUES OR APPARATUS

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B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
B82Y10/00 - Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
B82Y20/00 - Nanooptics, e.g. quantum optics or photonic crystals
B82Y35/00 - Methods or apparatus for measurement or analysis of nanostructures

G - PHYSICS G01 - MEASURING G01Q - SCANNING-PROBE TECHNIQUES OR APPARATUS
G01Q60/22 - Probes, their manufacture, or their related instrumentation, e.g. holders

G - PHYSICS G03 - PHOTOGRAPHY G03F - PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES
G03F7/70325 - {Resolution enhancement techniques not otherwise provided for, e.g. darkfield imaging, interfering beams, spatial frequency multiplication, nearfield lens}
G03F7/70825 - {Mounting of individual elements, e.g. mounts, holders or supports

G - PHYSICS G11 - INFORMATION STORAGE G11B - INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
G11B11/10534 - {for recording by magnetising, demagnetising or transfer of magnetisation, by radiation, e.g. for thermomagnetic recording}
G11B7/1374 - Objective lenses {
G11B7/1387 - using the near-field effect

Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC Y10S - TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
Y10S977/862 - Near-field probe

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DOE Contract Number:: FG03-90ER14157

Resource Type:: Patent

Country of Publication:: United States

Language:: English

Subject:: near; field; optical; scanning; employing; microfabricated; solid; immersion; lens; integrated; flexible; support; cantilever; membrane; described; method; forming; structure; flexible support; /250/

Citation Formats


                    Cozier, Kenneth B, Fletcher, Daniel A, Kino, Gordon S, Quate, Calvin F, and Soh, Hyongsok T. Near field optical scanning system employing microfabricated solid immersion lens.  United States: N. p., 2002. 
        Web.

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                    Cozier, Kenneth B, Fletcher, Daniel A, Kino, Gordon S, Quate, Calvin F, & Soh, Hyongsok T. Near field optical scanning system employing microfabricated solid immersion lens.  United States.

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                    Cozier, Kenneth B, Fletcher, Daniel A, Kino, Gordon S, Quate, Calvin F, and Soh, Hyongsok T. Tue .  
        "Near field optical scanning system employing microfabricated solid immersion lens".  United States.  https://www.osti.gov/servlets/purl/874687.

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@article{osti_874687,

  title        = {Near field optical scanning system employing microfabricated solid immersion lens},

  author       = {Cozier, Kenneth B and Fletcher, Daniel A and Kino, Gordon S and Quate, Calvin F and Soh, Hyongsok T},

  abstractNote = {A solid immersion lens integrated on a flexible support such as a cantilever or membrane is described, together with a method of forming the integrated structure.},

  doi          = {},

  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Tue Jan 01 00:00:00 EST 2002},

  month        = {Tue Jan 01 00:00:00 EST 2002}

}

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Works referenced in this record:

Solid‐state processes to produce hemispherical components for inertial fusion targets
journal, April 1981

Wise, K. D.; Robinson, M. G.; Hillegas, W. J.
Journal of Vacuum Science and Technology, Vol. 18, Issue 3
https://doi.org/10.1116/1.570866

Fabrication of hemispherical structures using semiconductor technology for use in thermonuclear fusion research
journal, May 1979

Wise, K. D.; Jackson, T. N.; Masnari, N. A.
Journal of Vacuum Science and Technology, Vol. 16, Issue 3
https://doi.org/10.1116/1.570116

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Title: Near field optical scanning system employing microfabricated solid immersion lens

Abstract

Citation Formats

Solid‐state processes to produce hemispherical components for inertial fusion targets journal, April 1981

Fabrication of hemispherical structures using semiconductor technology for use in thermonuclear fusion research journal, May 1979

Solid‐state processes to produce hemispherical components for inertial fusion targets
journal, April 1981

Fabrication of hemispherical structures using semiconductor technology for use in thermonuclear fusion research
journal, May 1979