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Title: Laser ablated hard coating for microtools

Abstract

Wear-resistant coatings composed of laser ablated hard carbon films, are deposited by pulsed laser ablation using visible light, on instruments such as microscope tips and micro-surgical tools. Hard carbon, known as diamond-like carbon (DLC), films produced by pulsed laser ablation using visible light enhances the abrasion resistance, wear characteristics, and lifetimes of small tools or instruments, such as small, sharp silicon tips used in atomic probe microscopy without significantly affecting the sharpness or size of these devices. For example, a 10-20 nm layer of diamond-like carbon on a standard silicon atomic force microscope (AFM) tip, enables the useful operating life of the tip to be increased by at least twofold. Moreover, the low inherent friction coefficient of the DLC coating leads to higher resolution for AFM tips operating in the contact mode.

Inventors:
 [1];  [2];  [2]
+ Show Inventor Affiliations
  1. (Oakland, CA)
  2. Berkeley, CA
Issue Date:
Research Org.:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
OSTI Identifier:
871524
Patent Number(s):
5747120
Application Number:
08/799085
Assignee:
Regents Of University Of California (Oakland, CA)
Patent Classifications (CPCs):
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
C - CHEMISTRY C23 - COATING METALLIC MATERIAL C23C - COATING METALLIC MATERIAL
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DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
laser; ablated; hard; coating; microtools; wear-resistant; coatings; composed; carbon; films; deposited; pulsed; ablation; visible; light; instruments; microscope; tips; micro-surgical; tools; diamond-like; dlc; produced; enhances; abrasion; resistance; wear; characteristics; lifetimes; sharp; silicon; atomic; probe; microscopy; significantly; affecting; sharpness; size; devices; example; 10-20; nm; layer; standard; force; afm; tip; enables; useful; operating; life; increased; twofold; moreover; inherent; friction; coefficient; leads; resolution; contact; mode; resistant coating; operating life; hard carbon; diamond-like carbon; visible light; pulsed laser; carbon film; laser ablation; resistant coatings; carbon films; significantly affecting; wear characteristics; atomic force; force microscope; hard coating; friction coefficient; abrasion resistance; probe microscopy; laser ablated; films produced; significantly affect; wear-resistant coating; ablated hard; /427/

Citation Formats

McLean, II, William, Balooch, Mehdi, and Siekhaus, Wigbert J. Laser ablated hard coating for microtools. United States: N. p., 1998. Web.
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McLean, II, William, Balooch, Mehdi, & Siekhaus, Wigbert J. Laser ablated hard coating for microtools. United States.
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McLean, II, William, Balooch, Mehdi, and Siekhaus, Wigbert J. Tue . "Laser ablated hard coating for microtools". United States. https://www.osti.gov/servlets/purl/871524.
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@article{osti_871524,
title = {Laser ablated hard coating for microtools},
author = {McLean, II, William and Balooch, Mehdi and Siekhaus, Wigbert J},
abstractNote = {Wear-resistant coatings composed of laser ablated hard carbon films, are deposited by pulsed laser ablation using visible light, on instruments such as microscope tips and micro-surgical tools. Hard carbon, known as diamond-like carbon (DLC), films produced by pulsed laser ablation using visible light enhances the abrasion resistance, wear characteristics, and lifetimes of small tools or instruments, such as small, sharp silicon tips used in atomic probe microscopy without significantly affecting the sharpness or size of these devices. For example, a 10-20 nm layer of diamond-like carbon on a standard silicon atomic force microscope (AFM) tip, enables the useful operating life of the tip to be increased by at least twofold. Moreover, the low inherent friction coefficient of the DLC coating leads to higher resolution for AFM tips operating in the contact mode.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue May 05 00:00:00 EDT 1998},
month = {Tue May 05 00:00:00 EDT 1998}
}
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Works referenced in this record:

Preparation of amorphous diamond-like carbon by pulsed laser deposition: a critical review
journal, August 1996

Laser plasma source of amorphic diamond
journal, January 1989

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