Laser ablated hard coating for microtools
Abstract
Wear-resistant coatings composed of laser ablated hard carbon films, are deposited by pulsed laser ablation using visible light, on instruments such as microscope tips and micro-surgical tools. Hard carbon, known as diamond-like carbon (DLC), films produced by pulsed laser ablation using visible light enhances the abrasion resistance, wear characteristics, and lifetimes of small tools or instruments, such as small, sharp silicon tips used in atomic probe microscopy without significantly affecting the sharpness or size of these devices. For example, a 10--20 nm layer of diamond-like carbon on a standard silicon atomic force microscope (AFM) tip, enables the useful operating life of the tip to be increased by at least twofold. Moreover, the low inherent friction coefficient of the DLC coating leads to higher resolution for AFM tips operating in the contact mode. 12 figs.
- Inventors:
- Issue Date:
- Research Org.:
- Univ. of California (United States)
- Sponsoring Org.:
- USDOE, Washington, DC (United States)
- OSTI Identifier:
- 644417
- Patent Number(s):
- 5747120
- Application Number:
- PAN: 8-799,085
- Assignee:
- Univ. of California, Oakland, CA (United States)
- DOE Contract Number:
- W-7405-ENG-48
- Resource Type:
- Patent
- Resource Relation:
- Other Information: PBD: 5 May 1998
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; 44 INSTRUMENTATION, INCLUDING NUCLEAR AND PARTICLE DETECTORS; WEAR RESISTANCE; PROTECTIVE COATINGS; CARBON; MICROSCOPES; TOOLS; MINIATURIZATION; SILICON; SURFACE COATING
Citation Formats
McLean, W II, Balooch, M, and Siekhaus, W J. Laser ablated hard coating for microtools. United States: N. p., 1998.
Web.
McLean, W II, Balooch, M, & Siekhaus, W J. Laser ablated hard coating for microtools. United States.
McLean, W II, Balooch, M, and Siekhaus, W J. Tue .
"Laser ablated hard coating for microtools". United States.
@article{osti_644417,
title = {Laser ablated hard coating for microtools},
author = {McLean, W II and Balooch, M and Siekhaus, W J},
abstractNote = {Wear-resistant coatings composed of laser ablated hard carbon films, are deposited by pulsed laser ablation using visible light, on instruments such as microscope tips and micro-surgical tools. Hard carbon, known as diamond-like carbon (DLC), films produced by pulsed laser ablation using visible light enhances the abrasion resistance, wear characteristics, and lifetimes of small tools or instruments, such as small, sharp silicon tips used in atomic probe microscopy without significantly affecting the sharpness or size of these devices. For example, a 10--20 nm layer of diamond-like carbon on a standard silicon atomic force microscope (AFM) tip, enables the useful operating life of the tip to be increased by at least twofold. Moreover, the low inherent friction coefficient of the DLC coating leads to higher resolution for AFM tips operating in the contact mode. 12 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue May 05 00:00:00 EDT 1998},
month = {Tue May 05 00:00:00 EDT 1998}
}