Ultrahigh vacuum focused ion beam micromill and articles therefrom
Abstract
An ultrahigh vacuum focused ion beam micromilling apparatus and process are disclosed. Additionally, a durable data storage medium using the micromilling process is disclosed, the durable data storage medium capable of storing, e.g., digital or alphanumeric characters as well as graphical shapes or characters. 6 figs.
- Inventors:
- Issue Date:
- Research Org.:
- Univ. of California (United States)
- Sponsoring Org.:
- USDOE, Washington, DC (United States)
- OSTI Identifier:
- 570403
- Patent Number(s):
- 5721687
- Application Number:
- PAN: 8-382,345
- Assignee:
- Univ. of California, Office of Technology Transfer, Alameda, CA (United States)
- DOE Contract Number:
- W-7405-ENG-36
- Resource Type:
- Patent
- Resource Relation:
- Other Information: PBD: 24 Feb 1998
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION; 99 MATHEMATICS, COMPUTERS, INFORMATION SCIENCE, MANAGEMENT, LAW, MISCELLANEOUS; MEMORY DEVICES; MILLING MACHINES; ION BEAMS; MILLING; VACUUM SYSTEMS; MINIATURIZATION
Citation Formats
Lamartine, B C, and Stutz, R A. Ultrahigh vacuum focused ion beam micromill and articles therefrom. United States: N. p., 1998.
Web.
Lamartine, B C, & Stutz, R A. Ultrahigh vacuum focused ion beam micromill and articles therefrom. United States.
Lamartine, B C, and Stutz, R A. Tue .
"Ultrahigh vacuum focused ion beam micromill and articles therefrom". United States.
@article{osti_570403,
title = {Ultrahigh vacuum focused ion beam micromill and articles therefrom},
author = {Lamartine, B C and Stutz, R A},
abstractNote = {An ultrahigh vacuum focused ion beam micromilling apparatus and process are disclosed. Additionally, a durable data storage medium using the micromilling process is disclosed, the durable data storage medium capable of storing, e.g., digital or alphanumeric characters as well as graphical shapes or characters. 6 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Feb 24 00:00:00 EST 1998},
month = {Tue Feb 24 00:00:00 EST 1998}
}
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