DOE Patents title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Efficient black silicon photovoltaic devices with enhanced blue response

Abstract

A photovoltaic (PV) device with improved blue response. The PV device includes a silicon substrate with an emitter layer on a light receiving side. The emitter layer has a low opant level such that it has sheet resistance of 90 to 170 ohm/sq. Anti-reflection in the PV device is provided solely by a nano-structured or black silicon surface on the light-receiving surface, through which the emitter is formed by diffusion. The nano structures of the black silicon are formed in a manner that does not result in gold or another high-recombination metal being left in the black silicon such as with metal-assisted etching using silver. The black silicon is further processed to widen these pores so as to provide larger nanostructures with lateral dimensions in the range of 65 to 150 nanometers so as to reduce surface area and also to etch away a highly doped portion of the emitter.

Inventors:
; ;
Issue Date:
Research Org.:
National Renewable Energy Laboratory (NREL), Golden, CO (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1892619
Patent Number(s):
11251318
Application Number:
14/002,950
Assignee:
Alliance for Sustainable Energy, LLC (Golden, CO)
Patent Classifications (CPCs):
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01L - SEMICONDUCTOR DEVICES
Y - NEW / CROSS SECTIONAL TECHNOLOGIES Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE Y02E - REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
DOE Contract Number:  
AC36-08GO28308
Resource Type:
Patent
Resource Relation:
Patent File Date: 03/08/2011
Country of Publication:
United States
Language:
English

Citation Formats

Oh, Jihun, Branz, Howard M., and Yuan, Hao-Chih. Efficient black silicon photovoltaic devices with enhanced blue response. United States: N. p., 2022. Web.
Oh, Jihun, Branz, Howard M., & Yuan, Hao-Chih. Efficient black silicon photovoltaic devices with enhanced blue response. United States.
Oh, Jihun, Branz, Howard M., and Yuan, Hao-Chih. Tue . "Efficient black silicon photovoltaic devices with enhanced blue response". United States. https://www.osti.gov/servlets/purl/1892619.
@article{osti_1892619,
title = {Efficient black silicon photovoltaic devices with enhanced blue response},
author = {Oh, Jihun and Branz, Howard M. and Yuan, Hao-Chih},
abstractNote = {A photovoltaic (PV) device with improved blue response. The PV device includes a silicon substrate with an emitter layer on a light receiving side. The emitter layer has a low opant level such that it has sheet resistance of 90 to 170 ohm/sq. Anti-reflection in the PV device is provided solely by a nano-structured or black silicon surface on the light-receiving surface, through which the emitter is formed by diffusion. The nano structures of the black silicon are formed in a manner that does not result in gold or another high-recombination metal being left in the black silicon such as with metal-assisted etching using silver. The black silicon is further processed to widen these pores so as to provide larger nanostructures with lateral dimensions in the range of 65 to 150 nanometers so as to reduce surface area and also to etch away a highly doped portion of the emitter.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Feb 15 00:00:00 EST 2022},
month = {Tue Feb 15 00:00:00 EST 2022}
}

Works referenced in this record:

Silicon Surface Roughening Mechanisms in Ammonia Hydrogen Peroxide Mixtures
journal, January 2000


Metal catalyst technique for texturing silicon solar cells
patent, December 2001


Novel Nanoparticle Patterning Process
patent-application, December 2007


Anti-Reflection Etching of Silicon Surfaces Catalyzed with Ionic Metal Solutions
patent-application, September 2009


High-Productivity Porous Semiconductor Manufacturing Equipment
patent-application, February 2011


Method of Forming an Array of High Aspect Ration Semiconductor Nanostructures
patent-application, February 2013


Systems and methods for forming processing streams
patent-application, August 2002


Spatial light modulators with light absorbing areas
patent-application, May 2014


Nanostructure-Film LCD Devices
patent-application, June 2009


Solar cell, method of manufacturing the same, and method of texturing solar cell
patent-application, July 2009


Silicon cells made by self-aligned selective-emitter plasma-etchback process
patent, July 2000


Method of forming nanoscale three-dimensional patterns in a porous material
patent, July 2013


Light Emitting Device
patent-application, July 2007


Method for producing multicrystalline silicon substrate for solar cells
patent-application, May 2005


Black multi-crystalline silicon solar cells
journal, March 2007


Metal-assisted chemical etch porous silicon formation method
patent, September 2004


Methods of forming a multi-doped junction with silicon-containing particles
patent-application, January 2011


Silicon substrate with periodical structure
patent-application, October 2010


Applications of laser-processed substrate for molecular diagnostics
patent-application, July 2010


Method of fabricating semiconductor device
patent-application, June 2007


Solar hydrogen charger
patent-application, January 2009


Method of producing semiconductor substrate
patent, October 1993


Electrophoretic displays using nanoparticles
patent-application, October 2002


Photonic silicon on a transparent substrate
patent, July 2000


Solar hydrogen charger
patent, November 2010


Intermediate transfer layers for nanoscale pattern transfer and nanostructure formation
patent-application, September 2002


Method of manufacturing solar cell
patent, February 2012


Method of forming pores in crystal substrate, and crystal substrate containing pores formed by the same
patent-application, April 2008


Forming High Efficiency Silicon Solar Cells Using Density-Graded Anti-reflection Surfaces
patent-application, December 2011


Superconducting detector and method of making same
patent, November 1993


Electroless deposition method
patent, June 2005


Patterning of various silicon structures via polymer lithography and catalytic chemical etching
journal, May 2011


Texturization of multicrystalline silicon wafers for solar cells by chemical treatment using metallic catalyst
journal, January 2006


Silicon membrane micro-scale
patent, October 1990


Method of fabricating a semiconductor device
patent-application, December 2004


Method of fabricating a semiconductor device
patent, July 2004


Method for forming silicon trench
patent, June 2012


Superhydrophobic and Low Light Reflectivity Silicon Surfaces Fabricated by Hierarchical Etching
journal, September 2008


Method for producing silicon substrate for solar cells
patent, November 2011


Method of fabricating solar cell
patent-application, June 2011


Extremely Superhydrophobic Surfaces with Micro- and Nanostructures Fabricated by Copper Catalytic Etching
journal, January 2011


Micromechanical membrane tilt-mirror switch
patent, January 2001


Electroless deposition method
patent-application, October 2003


Anti-Reflective Nanoporous Silicon for Efficient Hydrogen Production
patent-application, May 2012


Devices and methods for enhanced microneedle penetration of biological barriers
patent-application, June 2005


Method for forming high-resolution pattern with direct writing means
patent-application, December 2006


Black nonreflecting silicon surfaces for solar cells
journal, May 2006


Design and characterization of a robust photoelectrochemical device to generate hydrogen using solar water splitting
journal, September 2006


Conversion of Carbon Dioxide to Organic Products
patent-application, July 2010


Metal-Assisted Chemical Etching of Substrates
patent-application, September 2010


Fabrication of large area subwavelength antireflection structures on Si using trilayer resist nanoimprint lithography and liftoff
journal, January 2003

  • Yu, Zhaoning; Gao, He; Wu, Wei
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 21, Issue 6
  • https://doi.org/10.1116/1.1619958

Methods of nanostructure formation and shape selection
patent-application, March 2005


Electrophoretic displays using nanoparticles
patent, April 2004


Efficient SERS substrates made by electroless silver deposition into patterned silicon structures
journal, January 2004


Photoelectrochemical Behavior of n-Type Porous-Si Electrodes
journal, July 1986


Method and Device for Modulating Light
patent-application, May 2007


Method for Producing an Emitter Structure and Emitter Structures Resulting Therefrom
patent-application, June 2010


Nano-sized Taper Structure Formed by Wet Process Using Catalysis of Gold Nanoparticle
journal, January 2007


Photoelectrochemical device and electrode
patent, May 2006


Solar Cell Fabrication with Faceting and Ion Implantation
patent-application, December 2009


Copper-Assisted, Anti-Reflection Etching of Silicon Surfaces
patent-application, July 2012


Black silicon layer formation for application in solar cells
journal, November 2006


Methods for producing MEMS with protective coatings using multi-component sacrificial layers
patent-application, September 2007


Fabrication of Single-Crystalline Silicon Nanowires by Scratching a Silicon Surface with Catalytic Metal Particles
journal, February 2006


Texturing Surface of Light Absorbing Substrate
patent-application, September 2012


Semiconductor storage device and manufacturing method thereof
patent-application, December 2011


Wet-chemical systems and methods for producing black silicon substrates
patent-application, September 2013


Epitaxial Structures, Methods of Forming the Same, and Devices Including the Same
patent-application, October 2011


Structural and optical features of nanoporous silicon prepared by electrochemical anodic etching
journal, May 2004


Modification of metal nanoparticles for improved analyte detection by surface enhanced Raman spectroscopy (SERS)
patent-application, July 2007


Chemical etching of Si by Ag nanocatalysts in HF‐H 2 O 2 : application to multicrystalline Si solar cell texturisation
journal, June 2009


Multi-scale surface texture to improve blue response of nanoporous black silicon solar cells
journal, September 2011


Spatial Light Modulators With Light Blocking/absorbing Areas
patent-application, May 2004


Method of fabricating solar cell
patent, February 2012


Method for Manufacturing Solar Cell and Solar Cell, and Method for Manufacturing Semiconductor Device
patent-application, January 2009


Degenerate binding detection and protein identification using Raman spectroscopy nanoparticle labels
patent-application, July 2007


Self-assembled structures
patent-application, December 2005


Metal-assisted chemical etching in HF/H2O2 produces porous silicon
journal, October 2000


Porous silicon in solar cells: A review and a description of its application as an AR coating
journal, April 1995


Electrophoretic displays using nanoparticles
patent-application, May 2003


Solar Cell and Method of Manufacturing the Same
patent-application, June 2004


Method of Forming Micro-Pore Structures or Trench Structures on Surface of Silicon Wafer Substrate
patent-application, April 2012


Wide-Angle Antireflection Effect of Subwavelength Structures for Solar Cells
journal, June 2007


Metal-assisted chemical etch to produce porous group III-V materials
patent, July 2004


Solar Cell and Method of Manufacturing the Same
patent-application, October 2010


Nanostructured black silicon and the optical reflectance of graded-density surfaces
journal, June 2009


Method for Making a Semiconductor Switching Device
patent, April 1975


Optically black coating and process for forming it
patent, September 1978


Mixed-typed heterojunction thin-film solar cell structure and method for fabricating the same
patent-application, December 2009


Solar Cells with Textured Surfaces
patent-application, February 2011


Optical reflectance and transmission of a textured surface
journal, August 1977


Derivatization of silicon surfaces
patent, September 2001


Nanoparticle-based etching of silicon surfaces
patent, December 2011


Solae Energy Systems
patent-application, February 2012


Antireflection subwavelength structure of silicon surface formed by wet process using catalysis of single nano-sized gold particle
journal, August 2008


Electroless deposition method
patent, May 2005


Method for Texturing Silicon Surface to Create Black Silicon for Photovoltaic Applications
patent-application, April 2013


Efficient black silicon solar cell with a density-graded nanoporous surface: Optical properties, performance limitations, and design rules
journal, September 2009


Method for preparing substrate with periodical structure
patent-application, October 2010


Metal-assisted electrochemical etching of silicon
journal, October 2010


Multicrystalline silicon solar cells with porous silicon emitter
journal, February 2000


Electrophoretic displays using nanoparticles
patent, March 2003


Metal-assisted chemical etching of silicon in HF–H2O2
journal, July 2008


Method for producing silicon nanostructures
patent, December 2012


Local heterostructure contacts
patent-application, December 2009


Methods of forming spin-on-glass insulating layers in semiconductor devices and associated semiconductor device
patent-application, June 2005


Method of fabricating a semiconductor device
patent-application, June 2002


Nano/Micro-Structure and Fabrication Method Thereof
patent-application, December 2011


Hydrogen generation from photoelectrochemical water splitting based on nanomaterials
journal, September 2009


Solution Deposition of Inorganic Materials and Electronic Devices Made Comprising the Inorganic Materials
patent-application, August 2007


Antireflective porous-silicon coatings for multicrystalline solar cells: the effects of chemical etching and rapid thermal processing
journal, June 2001


Method of fabricating a semiconductor device
patent, November 2006


Method for Patterning Metal Using Nanoparticle Containing Precursors
patent-application, August 2007


Process for Structuring Silicon
patent-application, April 2010


Method of Manufacturing Solar Cell
patent-application, February 2010


10 μm minority-carrier diffusion lengths in Si wires synthesized by Cu-catalyzed vapor-liquid-solid growth
journal, October 2009


Method for raw etching silicon solar cells
patent-application, June 2003