Telescopic nanotube device for hot nanolithography
Abstract
A device for maintaining a constant tip-surface distance for producing nanolithography patterns on a surface using a telescopic nanotube for hot nanolithography. An outer nanotube is attached to an AFM cantilever opposite a support end. An inner nanotube is telescopically disposed within the outer nanotube. The tip of the inner nanotube is heated to a sufficiently high temperature and brought in the vicinity of the surface. Heat is transmitted to the surface for thermal imprinting. Because the inner tube moves telescopically along the outer nanotube axis, a tip-surface distance is maintained constant due to the vdW force interaction, which in turn eliminates the need of an active feedback loop.
- Inventors:
- Issue Date:
- Research Org.:
- Univ. of South Florida, Tampa, FL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1166765
- Patent Number(s):
- 8920700
- Application Number:
- 13/023,782
- Assignee:
- University of South Florida (Tampa, FL)
- Patent Classifications (CPCs):
-
B - PERFORMING OPERATIONS B26 - HAND CUTTING TOOLS B26D - CUTTING
B - PERFORMING OPERATIONS B82 - NANOTECHNOLOGY B82Y - SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
- DOE Contract Number:
- FG02-06ER46297
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2011 Feb 09
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 77 NANOSCIENCE AND NANOTECHNOLOGY
Citation Formats
Popescu, Adrian, and Woods, Lilia M. Telescopic nanotube device for hot nanolithography. United States: N. p., 2014.
Web.
Popescu, Adrian, & Woods, Lilia M. Telescopic nanotube device for hot nanolithography. United States.
Popescu, Adrian, and Woods, Lilia M. Tue .
"Telescopic nanotube device for hot nanolithography". United States. https://www.osti.gov/servlets/purl/1166765.
@article{osti_1166765,
title = {Telescopic nanotube device for hot nanolithography},
author = {Popescu, Adrian and Woods, Lilia M},
abstractNote = {A device for maintaining a constant tip-surface distance for producing nanolithography patterns on a surface using a telescopic nanotube for hot nanolithography. An outer nanotube is attached to an AFM cantilever opposite a support end. An inner nanotube is telescopically disposed within the outer nanotube. The tip of the inner nanotube is heated to a sufficiently high temperature and brought in the vicinity of the surface. Heat is transmitted to the surface for thermal imprinting. Because the inner tube moves telescopically along the outer nanotube axis, a tip-surface distance is maintained constant due to the vdW force interaction, which in turn eliminates the need of an active feedback loop.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Dec 30 00:00:00 EST 2014},
month = {Tue Dec 30 00:00:00 EST 2014}
}
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Works referenced in this record:
Fully digital controller for cantilever-based instruments
patent, June 2007
- Proksch, Roger; Cleveland, Jason; Bocek, Dan
- US Patent Document 7,234,342
Tunable multiwalled nanotube resonator
patent, March 2011
- Zettl, Alex; Jensen, Kenneth James; Girit, Caglar
- US Patent Document 7,915,973
Carbon nanotube oscillator surface profiling device and method of use
patent, November 2011
- Popescu, Adrian; Woods, Lilia M.; Bondarev, Igor V.
- US Patent Document 8,060,943
Nanolithography methods and products therefor and produced thereby
patent-application, September 2002
- Mirkin, Chad A.; Hong, Seunghun; Dravid, Vinayak P.
- US Patent Application 10/059593; 20020122873
Floating Tip Nanolithography
journal, July 2008
- Milner, Alexander A.; Zhang, Kaiyin; Prior, Yehiam
- Nano Letters, Vol. 8, Issue 7
A carbon nanotube oscillator as a surface profiling device
journal, September 2008
- Popescu, A.; Woods, L. M.; Bondarev, I. V.
- Nanotechnology, Vol. 19, Issue 43
Exploiting the properties of carbon nanotubes for nanolithography
journal, September 1998
- Dai, Hongjie; Franklin, Nathan; Han, Jie
- Applied Physics Letters, Vol. 73, Issue 11
Telescopic hot double wall carbon nanotube for nanolithography
journal, November 2009
- Popescu, A.; Woods, L. M.
- Applied Physics Letters, Vol. 95, Issue 20
Wafer scale production of carbon nanotube scanning probe tips for atomic force microscopy
journal, March 2002
- Yenilmez, Erhan; Wang, Qian; Chen, Robert J.
- Applied Physics Letters, Vol. 80, Issue 12
Nanoscale materials patterning and engineering by atomic force microscopy nanolithography
journal, November 2006
- Xie, X. N.; Chung, H. J.; Sow, C. H.
- Materials Science and Engineering: R: Reports, Vol. 54, Issue 1-2, p. 1-48
Heat transfer between a nano-tip and a surface
journal, June 2006
- Chapuis, Pierre-Olivier; Greffet, Jean-Jacques; Joulain, Karl
- Nanotechnology, Vol. 17, Issue 12