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Title: Hot wire production of single-wall and multi-wall carbon nanotubes

Patent ·
OSTI ID:1016016

Apparatus (210) for producing a multi-wall carbon nanotube (213) may comprise a process chamber (216), a furnace (217) operatively associated with the process chamber (216), and at least one filament (218) positioned within the process chamber (216). At least one power supply (220) operatively associated with the at least one filament (218) heats the at least one filament (218) to a process temperature. A gaseous carbon precursor material (214) operatively associated with the process chamber (216) provides carbon for forming the multi-wall carbon nanotube (213). A metal catalyst material (224) operatively associated with the process (216) catalyzes the formation of the multi-wall carbon nanotube (213).

Research Organization:
National Renewable Energy Laboratory (NREL), Golden, CO (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC36-99GO10337
Assignee:
Alliance for Sustainable Energy, LLC (Golden, CO)
Patent Number(s):
7,820,132
Application Number:
10/548,924
OSTI ID:
1016016
Resource Relation:
Patent File Date: 2003 Mar 13
Country of Publication:
United States
Language:
English

References (7)

Field electron emission from patterned nanostructured carbon films on sodalime glass substrates
  • Park, Kyung Ho; Lee, Kyung Moon; Choi, Seungho
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 19, Issue 3 https://doi.org/10.1116/1.1373641
journal January 2001
Synthesis of Large Arrays of Well-Aligned Carbon Nanotubes on Glass journal November 1998
Batch processing of nanometer-scale electrical circuitry based on in-situ grown single-walled carbon nanotubes journal July 2002
Electric-field-enhanced growth of carbon nanotubes for scanning probe microscopy journal January 2002
Chemical Vapor Deposition of Crystalline and Amorphous Carbon, Silicon and Germanium Films book January 1994
Hot Filament for In Situ Catalyst Supply in the Chemical Vapor Deposition Growth of Carbon Nanotubes journal January 2002
Growth characteristics of carbon nanotubes by plasma enhanced hot filament chemical vapor deposition journal September 2000

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