RF-MEMS capacitive switches with high reliability
Abstract
A reliable long life RF-MEMS capacitive switch is provided with a dielectric layer comprising a "fast discharge diamond dielectric layer" and enabling rapid switch recovery, dielectric layer charging and discharging that is efficient and effective to enable RF-MEMS switch operation to greater than or equal to 100 billion cycles.
- Inventors:
- Issue Date:
- Research Org.:
- UChicago Argonne, LLC, Argonne, IL (United States)
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1092767
- Patent Number(s):
- 8525185
- Application Number:
- 13/081,683
- Assignee:
- UChicago Argonne, LLC (Argonne, IL)
- Patent Classifications (CPCs):
-
H - ELECTRICITY H01 - BASIC ELECTRIC ELEMENTS H01H - ELECTRIC SWITCHES
H - ELECTRICITY H03 - BASIC ELECTRONIC CIRCUITRY H03K - PULSE TECHNIQUE
- DOE Contract Number:
- FG02-02ER46016
- Resource Type:
- Patent
- Resource Relation:
- Patent File Date: 2011 Apr 07
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 42 ENGINEERING
Citation Formats
Goldsmith, Charles L., Auciello, Orlando H., Carlisle, John A., Sampath, Suresh, Sumant, Anirudha V., Carpick, Robert W., Hwang, James, Mancini, Derrick C., and Gudeman, Chris. RF-MEMS capacitive switches with high reliability. United States: N. p., 2013.
Web.
Goldsmith, Charles L., Auciello, Orlando H., Carlisle, John A., Sampath, Suresh, Sumant, Anirudha V., Carpick, Robert W., Hwang, James, Mancini, Derrick C., & Gudeman, Chris. RF-MEMS capacitive switches with high reliability. United States.
Goldsmith, Charles L., Auciello, Orlando H., Carlisle, John A., Sampath, Suresh, Sumant, Anirudha V., Carpick, Robert W., Hwang, James, Mancini, Derrick C., and Gudeman, Chris. Tue .
"RF-MEMS capacitive switches with high reliability". United States. https://www.osti.gov/servlets/purl/1092767.
@article{osti_1092767,
title = {RF-MEMS capacitive switches with high reliability},
author = {Goldsmith, Charles L. and Auciello, Orlando H. and Carlisle, John A. and Sampath, Suresh and Sumant, Anirudha V. and Carpick, Robert W. and Hwang, James and Mancini, Derrick C. and Gudeman, Chris},
abstractNote = {A reliable long life RF-MEMS capacitive switch is provided with a dielectric layer comprising a "fast discharge diamond dielectric layer" and enabling rapid switch recovery, dielectric layer charging and discharging that is efficient and effective to enable RF-MEMS switch operation to greater than or equal to 100 billion cycles.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Sep 03 00:00:00 EDT 2013},
month = {Tue Sep 03 00:00:00 EDT 2013}
}
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Works referenced in this record: