High-efficiency 5000 lines/mm multilayer-coated blazed grating for EUV wavelengths
Volume x-ray gratings consisting of a multilayer coating deposited on a blazed substrate can diffract with very high efficiency even in high orders if diffraction conditions in-plane (grating) and out-of-plane (Bragg multilayer) are met simultaneously. This remarkable property however depends critically on the ability to create a structure with near atomic perfection. In this work we report on a method to produce these structures. We report measurements that show, for a 5000 l/mm grating diffracting in the 3rd order, a diffraction efficiency of 37.6percent at a wavelength of 13.6 nm, close to the theoretical maximum. This work now shows a direct route to achieving high diffraction efficiency in high order at wavelengths throughout the soft x-ray energy range.
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- Advanced Light Source Division
- DOE Contract Number:
- DE-AC02-05CH11231
- OSTI ID:
- 983218
- Report Number(s):
- LBNL-3366E; OPLEDP; TRN: US201014%%836
- Journal Information:
- Optics Letters, Vol. 35, Issue 15; ISSN 0146-9592
- Country of Publication:
- United States
- Language:
- English
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