A 10,000 groove/mm multilayer coated grating for EUV spectroscopy
Ultra-high spectral resolution in the EUV and soft x-ray energy ranges requires the use of very high line density gratings with optimal design resulting in use of a Blazed Multilayer Grating (BMG) structure. Here we demonstrate the production of near-atomically perfect Si blazed substrates with an ultra-high groove density (10,000 l/mm) together with the measured and theoretical performance of an Al/Zr multilayer coating on the grating. A 1st order absolute efficiency of 13percent and 24.6percent was achieved at incidence angles of 11o and 36o respectively. Cross-sectional TEM shows the effect of smoothing caused by the surface mobility of deposited atoms and we correlate this effect with a reduction in peak diffraction efficiency. This work shows the high performance that can be achieved with BMGs based on small-period anisotropic etched Si substrates, but also the constraints imposed by the surface mobility of deposited species.
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- Advanced Light Source Division
- DOE Contract Number:
- DE-AC02-05CH11231
- OSTI ID:
- 1012476
- Report Number(s):
- LBNL-4524E; TRN: US201110%%111
- Journal Information:
- Optics Express, Vol. 19, Issue 7; ISSN 1094--4087
- Country of Publication:
- United States
- Language:
- English
Similar Records
High efficiency multilayer blazed gratings for EUV and soft X-rays: Recent developments
Fabrication and characterization of a new high density Sc/Si multilayer sliced grating