Deposition parameters and film properties of hydrogenated amorphous silicon prepared by high rate dc planar magnetron reactive sputtering
The sputtering characteristics for film deposition of hydrogenated amorphous silicon (a-Si:H) by dc planar magnetron reactive sputtering have been investigated for a range of H/sub 2//Ar pressures and applied power. These results indicate that the dc planar magnetron utilizing a silicon target is a high performance sputtering source offering a greater potential for the enlargement of solar cell area and a saving in device-processing time than other film deposition techniques currently in use. Film properties have been measured as a function of hydrogen partial pressure p/sub H/. Results are reported of the room temperature dark conductivity and photoconductivity of films versus p/sub H/ for p/sub H/ = 0 --0.5 Pa. Films suitable for photovoltaic applications were prepared possessing dark conductivity < or approx. =10/sup -8/ ..cap omega../sup -1/ cm/sup -1/ and photoconductivity approx.10/sup -4/ ..cap omega../sup -1/ cm/sup -1/. The optical absorption coefficient has been determined as a function of photon energy in the range 0.5--6.0 eV. The optical gap was found to increase with p/sub H/ from 1.7 eV for unhydrogenated material to 2.0 eV for material prepared at p/sub H/ = 3 Pa.
- Research Organization:
- School of Physics, University of Sydney, N.S.W. 2006, Australia
- OSTI ID:
- 7034916
- Journal Information:
- J. Appl. Phys.; (United States), Vol. 55:12
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
SILICON
OPACITY
PHOTOCONDUCTIVITY
SPUTTERING
SILICON SOLAR CELLS
FABRICATION
SURFACE COATING
AMORPHOUS STATE
ARGON
ELECTRIC CONDUCTIVITY
FILMS
HYDROGEN
HYDROGENATION
MAGNETRONS
PHOTOVOLTAIC EFFECT
CHEMICAL REACTIONS
DEPOSITION
DIRECT ENERGY CONVERTERS
ELECTRICAL PROPERTIES
ELECTRON TUBES
ELECTRONIC EQUIPMENT
ELEMENTS
EQUIPMENT
FLUIDS
GASES
MICROWAVE EQUIPMENT
MICROWAVE TUBES
NONMETALS
OPTICAL PROPERTIES
PHOTOELECTRIC CELLS
PHOTOELECTROMAGNETIC EFFECTS
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
RARE GASES
SEMIMETALS
SOLAR CELLS
SOLAR EQUIPMENT
140501* - Solar Energy Conversion- Photovoltaic Conversion