Growth and characterization of high-[Tc] Y[sub 1]Ba[sub 2]Cu[sub 3]O[sub 7[minus]x] superconducting thin films by chemical vapor deposition

Miscellaneous · Wed Jan 01 00:00:00 EST 1992

OSTI ID:6982764

Feng, A

In chapter I, the current status of high-Tc superconductors (especially Y[sub 1]Ba[sub 2]Cu[sub 3]O[sub 7[minus]x]), their microstructures and their unique physical properties are reviewed. An introduction to the potential and importance of those high-Tc superconductors in practical applications, especially for the application of YBCO thin films in microelectronics, is given. A general description of the common YBCO thin film fabrication and characterization techniques is also presented in this first chapter. Chapter II describes a new CVD process, temperature-controlled chemical vapor deposition (TC-CVD) for the growth of YBCO superconducting thin films on substrates of practical importance, such as sapphire (Al[sub 2]O[sub 3]) and on substrates of lattice matched perovskite-type single crystals, such as LaAlO[sub 3]. In order to verify the viability of this new CVD process the qualities of YBCO superconducting thin films were examined by various characterization methods, such as resistivity vs. temperature (R vs. T), scanning electron microscopy (SEM), X-ray diffraction (XRD), and magnetic susceptibility (x) measurements. Chapter III deals with the effect of substrate temperature on the properties of YBCO thin films made by TC-CVD. The principle objective of this study is to raise the transition temperature and critical current densities of CVD YBCO superconducting thin films. Understanding the relations between YBCO film growth process and varying substrate temperatures proved to be crucial in reaching this goal. The authors present the characterization results of YBCO thin films produced by different temperature schemes, to illustrate the importance of varying substrate temperature during the film growth. In chapter IV, the Rutherford backscattering (RBS) channeling technique is described. They have used RBS channeling to characterize the epitaxial YBCO thin film's crystallinity and lattice alignment. Transmission electron microscopy studies are also included.

• Research Organization: State Univ. of New York, Albany, NY (United States)
• OSTI ID: 6982764
• Resource Relation: Other Information: Thesis (Ph.D.)
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
BARIUM COMPOUNDS
CHEMICAL VAPOR DEPOSITION
CUPRATES
HIGH-TC SUPERCONDUCTORS
THIN FILMS
PRODUCTION
YTTRIUM COMPOUNDS
ALKALINE EARTH METAL COMPOUNDS
CHEMICAL COATING
COPPER COMPOUNDS
DEPOSITION
FILMS
OXYGEN COMPOUNDS
SUPERCONDUCTORS
SURFACE COATING
TRANSITION ELEMENT COMPOUNDS
360201* - Ceramics
Cermets
& Refractories- Preparation & Fabrication
360207 - Ceramics
Cermets
& Refractories- Superconducting Properties- (1992-)