Vacuum processing system for quartz-crystal resonators

Conference · Thu Jan 01 00:00:00 EST 1981

OSTI ID:6759734

Frank, J M

An ultra-high vacuum system has been developed to process quartz crystal resonators through electroding and sealing of the enclosures without air exposure. The functions to be performed in the system are ultraviolet/ozone cleaning, vacuum bake, deposition of gold electrodes to a specified resonant frequency, and thermocompression sealing of the enclosure. Unplated resonators, mounted in flatpack ceramic frames, are loaded into the system from a controlled argon atmosphere and the completed units are removed from the system through the same argon atmosphere. During normal operation, the inside of the vacuum chamber will not be exposed to air. The major criteria in the design of the system were established to permit laboratory fabrication of small batches of resonators that have been subjected to a minimum of processing variables, have the lowest attainable internal pressure, and are sealed in the cleanest environment that can be provided.

• Research Organization: General Electric Co., St. Petersburg, FL (USA). Neutron Devices Dept.
• DOE Contract Number: AC04-76DP00656
• OSTI ID: 6759734
• Report Number(s): GEPP-OP-566; CONF-810550-2; ON: DE83000093
• Resource Relation: Conference: 35. annual frequency control symposium, Philadelphia, PA, USA, 27 May 1981; Other Information: Portions of document are illegible
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
REMOTE HANDLING EQUIPMENT
DESIGN
RESONATORS
FABRICATION
VACUUM SYSTEMS
CLEANING
ELECTRODES
ENCAPSULATION
LABORATORY EQUIPMENT
QUARTZ
ULTRAHIGH VACUUM
CHALCOGENIDES
ELECTRONIC EQUIPMENT
EQUIPMENT
MATERIALS HANDLING EQUIPMENT
MINERALS
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
SILICON COMPOUNDS
SILICON OXIDES
420700* - Engineering- Vacuum Engineering- (-1987)
420203 - Engineering- Handling Equipment & Procedures
420800 - Engineering- Electronic Circuits & Devices- (-1989)