CVD scaled up for commercial production of bulk SiC
A recent development at Morton International's Advanced Materials group is having a revolutionary impact on the materials world. The firm has successfully scaled production of bulk, cubic ([beta]), chemically vapor deposited (CVD) silicon carbide (SiC) to support commercial requirements. To date, they have produced free standing CVD SiC substrates in sheets up to 60 in. across and over one inch thick. The material can also be grown as smaller near-net-shape parts in many different popular geometries. The parts produced by the process are monolithic. Commercially known as CVD SILICON CARBIDE, the material is single phase, theoretically dense, and 99.999% pure, [beta]-SiC. These characteristics lead to superior product attributes such as high values of hardness, flexural strength, and thermal conductivity. Additionally, the product has demonstrated superior oxidation resistance, and polishability. Several markets have shown an interest in the material including: optics, wear parts, information storage, and electronic packaging. Other applications for the material are emerging on what seems like a daily basis.
- OSTI ID:
- 6490078
- Journal Information:
- American Ceramic Society Bulletin; (United States), Vol. 72:3; ISSN 0002-7812
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
SILICON CARBIDES
CHEMICAL VAPOR DEPOSITION
AUTOMOTIVE INDUSTRY
BERYLLIUM
COMPARATIVE EVALUATIONS
MANUFACTURING
MECHANICAL PROPERTIES
MEMORY DEVICES
OPTICAL SYSTEMS
PACKAGING
PHYSICAL PROPERTIES
TECHNOLOGY ASSESSMENT
TECHNOLOGY TRANSFER
USES
ALKALINE EARTH METALS
CARBIDES
CARBON COMPOUNDS
CHEMICAL COATING
DEPOSITION
ELEMENTS
EVALUATION
INDUSTRY
METALS
SILICON COMPOUNDS
SURFACE COATING
360201* - Ceramics
Cermets
& Refractories- Preparation & Fabrication