Photochemical vapor deposition of undoped and n-type amorphous silicon films produced from disilane
Hydrogenated amorphous silicon films have been deposited by mercury photosensitized decomposition (photochemical vapor deposition: photo-CVD) of disilane at a substrate temperature below 300 /sup 0/C. The structural and optical properties of undoped films are very similar to those of films deposited by rf glow discharge decomposition. The electronic property measurement shows that the conductivity strongly depends on the substrate temperature during deposition. The photoconductivity reaches 5.7 x 10/sup -3/ (..cap omega.. cm)/sup -1/ (AM1,100 mW/cm/sup 2/) at a substrate temperature of 200 /sup 0/C. The dark conductivity is 10/sup -6/--10/sup -8/ (..cap omega.. cm)/sup -1/ and the Fermi level is located near the middle of the gap. n-type doping has been also achieved by adding phosphine as an impurity to disilane. Furthermore, a p-i-n a-Si solar cell was fabricated using photo-CVD undoped and P-doped films. The initial cell showed a conversion efficiency of 4.39% under AM1 insolation.
- Research Organization:
- Tokyo Institute of Technology, 2-12-1, Ohokayama, Meguro-Ku, Tokyo 152, Japan
- OSTI ID:
- 5840200
- Journal Information:
- Appl. Phys. Lett.; (United States), Vol. 43:8
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
SILANES
DISSOCIATION
PHOTOCHEMICAL REACTIONS
SILICON
CHEMICAL VAPOR DEPOSITION
CRYSTAL STRUCTURE
OPTICAL PROPERTIES
SILICON SOLAR CELLS
EFFICIENCY
FABRICATION
AMORPHOUS STATE
FERMI LEVEL
HYDROGENATION
LOW TEMPERATURE
MEDIUM TEMPERATURE
N-TYPE CONDUCTORS
PHOSPHINES
PHOTOCONDUCTIVITY
SUBSTRATES
THIN FILMS
CHEMICAL COATING
CHEMICAL REACTIONS
DEPOSITION
DIRECT ENERGY CONVERTERS
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELEMENTS
ENERGY LEVELS
EQUIPMENT
FILMS
HYDRIDES
HYDROGEN COMPOUNDS
MATERIALS
PHOSPHORUS COMPOUNDS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
SEMICONDUCTOR MATERIALS
SEMIMETALS
SILICON COMPOUNDS
SOLAR CELLS
SOLAR EQUIPMENT
SURFACE COATING
140501* - Solar Energy Conversion- Photovoltaic Conversion
360601 - Other Materials- Preparation & Manufacture