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Title: Stability of multilayers at high temperatures

Conference ·
OSTI ID:5821877

The temperature stability of metal (W, WRe, Co, Cr)-carbon multilayers has been studied using x-ray diffraction (theta-2theta and Debye-Scherrer) and electron microscopy. Results show that in all cases a crystallization occurs in the temperature range 650 to 750/sup 0/C. As a consequence of this crystallization, the layered structure is destroyed, the surface of the film becomes rough and the x-ray reflectivity is considerably reduced. These results imply that efficient cooling or new multilayer structures will have to be developed for use at high temperatures or under high x-ray incident flux.

Research Organization:
Argonne National Lab., IL (USA); International Business Machines Corp., Yorktown Heights, NY (USA). Thomas J. Watson Research Center
DOE Contract Number:
W-31-109-ENG-38
OSTI ID:
5821877
Report Number(s):
CONF-860366-7; ON: DE86010526
Resource Relation:
Conference: SPIE technical symposium on applications of artificial intelligence, Orlando, FL, USA, 31 Mar 1986; Other Information: Portions of this document are illegible in microfiche products
Country of Publication:
United States
Language:
English