skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Structural and electrical characterization of polycrystalline semiconductor materials

Conference ·
OSTI ID:5394785

Secondary electron imaging, electron channeling and electron-beam-induced current (EBIC) are used alternately in a scanning electron microscope to characterize and correlate the morphology, crystallographic orientation, and electronic quality (types and spatial distribution of defects) of individual grains in polycrystalline semiconductor samples. The technique is discussed in some detail, and a number of applications and results in the study of edge-supported-pulling (ESP) silicon sheet and low-angle silicon sheet (LASS) materials are reported.

Research Organization:
Solar Energy Research Inst., Golden, CO (USA)
DOE Contract Number:
AC02-83CH10093
OSTI ID:
5394785
Report Number(s):
SERI/TP-213-2689; CONF-850421-13; ON: DE85012166
Resource Relation:
Conference: 2. spring meeting of the Materials Research Society, San Francisco, CA, USA, 15 Apr 1985
Country of Publication:
United States
Language:
English