Filtered cathodic arc source
A continuous, cathodic arc ion source coupled to a macro-particle filter capable of separation or elimination of macro-particles from the ion flux produced by cathodic arc discharge is described. The ion source employs an axial magnetic field on a cathode (target) having tapered sides to confine the arc, thereby providing high target material utilization. A bent magnetic field is used to guide the metal ions from the target to the part to be coated. The macro-particle filter consists of two straight solenoids, end to end, but placed at 45[degree] to one another, which prevents line-of-sight from the arc spot on the target to the parts to be coated, yet provides a path for ions and electrons to flow, and includes a series of baffles for trapping the macro-particles. 3 figures.
- DOE Contract Number:
- W-7405-ENG-48
- Assignee:
- Dept. of Energy, Washington, DC ()
- Patent Number(s):
- US 5279723; A
- Application Number:
- PPN: US 7-921780
- OSTI ID:
- 5173594
- Resource Relation:
- Patent File Date: 30 Jul 1992
- Country of Publication:
- United States
- Language:
- English
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Filtered cathodic arc source
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