A filtered cathodic arc deposition apparatus and method
A filtered cathodic arc deposition method and apparatus are described for the production of highly dense, wear resistant coatings which are free from macro particles. The filtered cathodic arc deposition apparatus includes a cross shaped vacuum chamber which houses a cathode target having an evaporable surface comprised of the coating material, means for generating a stream of plasma, means for generating a transverse magnetic field, and a macro particle deflector. The transverse magnetic field bends the generated stream of plasma in the direction of a substrate. Macro particles are effectively filtered from the stream of plasma by traveling, unaffected by the transverse magnetic field, along the initial path of the plasma stream to a macro particle deflector. The macro particle deflector has a preformed surface which deflects macro particles away from the substrate.
- Research Organization:
- Argonne National Lab., IL (US)
- Sponsoring Organization:
- US Department of Energy (US)
- DOE Contract Number:
- W-31109-ENG-38
- Assignee:
- DOEGC; EDB-00:082092
- Patent Number(s):
- PATENTS-US-A8828026
- Application Number:
- 8-828,026; TRN: AH200031%%44
- OSTI ID:
- 757399
- Resource Relation:
- Patent File Date: 1997 Mar 27; Other Information: PBD: 1 Dec 1997
- Country of Publication:
- United States
- Language:
- English
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