Refractive index and hygroscopic stability of Al{sub x}Ga{sub 1{minus}x}As native oxides
- Department of Electrical Engineering, University of Notre Dame, Notre Dame, Indiana 46556 (United States)
- Sandia National Laboratory, Albuquerque, New Mexico 87185 (United States)
We present prism coupling measurements on Al{sub x}Ga{sub 1{minus}x}As native oxides showing the dependence of refractive index on composition (0.3{le}x{le}0.97), oxidation temperature (400{le}T{le}500), and carrier gas purity. Index values range from n=1.490 (x=0.9, 400 {degree}C) to 1.707 (x=0.3, 500 {degree}C). The oxides are shown to adsorb moisture, increasing their index by up to 0.10 (7{percent}). Native oxides of Al{sub x}Ga{sub 1{minus}x}As (x{le}0.5) have index values up to 0.27 higher and are less hygroscopic when prepared with a small amount of O{sub 2} in the N{sub 2}+H{sub 2}O process gas. The higher index values are attributed to a transition from a hydroxide to a denser (Al{sub x}Ga{sub 1{minus}x}){sub 2}O{sub 3} oxide phase. {copyright} {ital 1999 American Institute of Physics.}
- OSTI ID:
- 365972
- Journal Information:
- Applied Physics Letters, Vol. 75, Issue 8; Other Information: PBD: Aug 1999
- Country of Publication:
- United States
- Language:
- English
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