A three-dimensional reconstruction algorithm for scanning transmission electron microscopy data from thick samples

Journal Article · Sun Nov 15 00:00:00 EST 2020

OSTI ID:1815397

Brown, Hamish G; Pelz, Philipp M; Hsu, Shang-Lin; Zhang, Zimeng; Ramesh, Ramamoorthy; Inzani, Katherine; Sheridan, Evan; Griffin, Sinéad M; Findlay, Scott D; Allen, Leslie J; Scott, Mary C; Ophus, Colin; Ciston, Jim

Increasing interest in three-dimensional nanostructures adds impetus to electron microscopy techniques capable of imaging at or below the nanoscale in three dimensions. We present a reconstruction algorithm that takes as input a focal series of four-dimensional scanning transmission electron microscopy (4D-STEM) data and transcends the prevalent structure retrieval algorithm assumption of a very thin specimen homogenous along the optic axis. We demonstrate this approach by reconstructing the different layers of a lead iridate (Pb$$_2$$Ir$$_2$$O$$_7$$) and yttrium-stabilized zirconia (Y$$_{0.095}$$Zr$$_{0.905}$$O$$_2$$) heterostructure from data acquired with the specimen in a single plan-view orientation, with the epitaxial layers stacked along the beam direction.

• Research Organization: Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
• Sponsoring Organization: USDOE Office of Science (SC), Basic Energy Sciences (BES)
• DOE Contract Number: AC02-05CH11231
• OSTI ID: 1815397
• Country of Publication: United States
• Language: English