Three-Dimensional Solid-State Lithium-Ion Batteries Fabricated by Conformal Vapor-Phase Chemistry

Pearse, Alexander; Schmitt, Thomas; Sahadeo, Emily; Stewart, David M.; Kozen, Alexander; Gerasopoulos, Konstantinos; Talin, Albert Alec; Lee, Sang Bok; Rubloff, Gary W.; Gregorczyk, Keith E.

doi:10.1021/acsnano.7b08751

Title: Three-Dimensional Solid-State Lithium-Ion Batteries Fabricated by Conformal Vapor-Phase Chemistry

Journal Article · Tue Apr 24 00:00:00 EDT 2018 · ACS Nano

DOI:https://doi.org/10.1021/acsnano.7b08751· OSTI ID:1464200

^[1]; Schmitt, Thomas ^[1]; Sahadeo, Emily ^[1];

^[1]; Kozen, Alexander ^[2]; Gerasopoulos, Konstantinos ^[3];

^[4]; Lee, Sang Bok ^[1]; Rubloff, Gary W. ^[1];

^[1]

Univ. of Maryland, College Park, MD (United States)
American Society for Engineering Education, Washington, D.C. (United States)
The Johns Hopkins Univ. Applied Physics Lab., Laurel, MD (United States)
Sandia National Lab. (SNL-CA), Livermore, CA (United States)

Three-dimensional thin-film solid-state batteries (3D TSSB) were proposed by Long et al. in 2004 as a structure-based approach to simultaneously increase energy and power densities. Here, we report experimental realization of fully conformal 3D TSSBs, demonstrating the simultaneous power-and-energy benefits of 3D structuring. All active battery components—electrodes, solid electrolyte, and current collectors—were deposited by atomic layer deposition (ALD) onto standard CMOS processable silicon wafers microfabricated to form arrays of deep pores with aspect ratios up to approximately 10. The cells utilize an electrochemically prelithiated LiV₂O₅ cathode, a very thin (40–100 nm) Li₂PO₂N solid electrolyte, and a SnNx anode. The fabrication process occurs entirely at or below 250 °C, promising compatibility with a variety of substrates as well as integrated circuits. The multilayer battery structure enabled all-ALD solid-state cells to deliver 37 μAh/cm²·μm (normalized to cathode thickness) with only 0.02% per-cycle capacity loss. Conformal fabrication of full cells over 3D substrates increased the areal discharge capacity by an order of magnitude while simulteneously improving power performance, a trend consistent with a finite element model. Furthermore, this work shows that the exceptional conformality of ALD, combined with conventional semiconductor fabrication methods, provides an avenue for the successful realization of long-sought 3D TSSBs which provide power performance scaling in regimes inaccessible to planar form factor cells.

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Research Organization:: Sandia National Lab. (SNL-CA), Livermore, CA (United States); Energy Frontier Research Centers (EFRC) (United States). Nanostructures for Electrical Energy Storage (NEES)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES)

Grant/Contract Number:: AC04-94AL85000

OSTI ID:: 1464200

Report Number(s):: SAND-2018-8254J; 666442

Journal Information:: ACS Nano, Vol. 12, Issue 5; ISSN 1936-0851

Publisher:: American Chemical Society (ACS)Copyright Statement

Country of Publication:: United States

Language:: English

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Cited by: 73 works

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