3D LiMn2O4nThin Film Deposited by ALD: A Road toward High-Capacity Electrode for 3D Li-Ion Microbatteries

Hallot, Maxime; Nikitin, Viktor; Lebedev, Oleg I.; Retoux, Richard; Troadec, David; De Andrade, Vincent; Roussel, Pascal; Lethien, Christophe

doi:10.1002/smll.202107054

Title: 3D LiMn₂O₄nThin Film Deposited by ALD: A Road toward High-Capacity Electrode for 3D Li-Ion Microbatteries

Journal Article · Thu Feb 17 00:00:00 EST 2022 · Small

DOI:https://doi.org/10.1002/smll.202107054· OSTI ID:1882425

Hallot, Maxime ^[1]; Nikitin, Viktor ^[2]; Lebedev, Oleg I. ^[3]; Retoux, Richard ^[3]; Troadec, David ^[4]; De Andrade, Vincent ^[2]; Roussel, Pascal ^[5];

^[6]

Univ. Lille (France); Univ. Polytechnique Hauts-de-France, Lille (France); Centre National de la Recherche Scientifique (CNRS) (France)
Argonne National Lab. (ANL), Argonne, IL (United States)
Centre National de la Recherche Scientifique (CNRS), Caen (France)
Univ. Lille (France); Univ. Polytechnique Hauts-de-France, Lille (France)
Univ. Lille (France)
Univ. Lille (France); Univ. Polytechnique Hauts-de-France, Lille (France); Centre National de la Recherche Scientifique (CNRS) (France); Institut Universitaire de France (IUF), Paris (France)

Abstract Miniaturized electronics suffer from a lack of energy autonomy. In that context, the fabrication of lithium‐ion solid‐state microbatteries with high performance is mandatory for powering the next generation of portable electronic devices. Here, the fabrication of a thin film positive electrode for 3D Li‐ion microbatteries made by the atomic layer deposition (ALD) method and in situ lithiation step is demonstrated. The 3D electrodes based on spinel LiMn ₂ O ₄ films operate at high working potential (4.1 V vs Li/Li ⁺ ) and are capable of delivering a remarkable surface capacity (≈180 μAh cm ⁻² ) at low C‐rate while maintaining more than 40 μAh cm ⁻² at C/2 (time constant = 2 h). Both the thickness of the electrode material and the 3D gain of the template are carefully tuned to maximize the electrode performance. Advanced characterization techniques such as transmission electron and X‐ray transmission microscopies are proposed as perfect tools to study the conformality of the deposited films and the interfaces between each layer: no interdiffusion or segregation are observed. This work represents a major issue towards the fabrication of 3D‐lithiated electrode by ALD—without any prelithiation step by electrochemical technique—making it an attractive solution for the fabrication of 3D Li‐ion solid‐state microbatteries with semiconductor processing methods.

View Accepted Manuscript (DOE)

View Accepted Manuscript (Publisher)

Cite

Export

Save

Research Organization:: Argonne National Laboratory (ANL), Argonne, IL (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES); French National Research Agency (ANR)

Grant/Contract Number:: AC02-06CH11357; ANR-17-CE09-0016-01

OSTI ID:: 1882425

Alternate ID(s):: OSTI ID: 1845732

Journal Information:: Small, Vol. 18, Issue 14; ISSN 1613-6810

Publisher:: WileyCopyright Statement

Country of Publication:: United States

Language:: English

References (39)

Review—Power Sources for the Internet of Things Raj, Abhi; Steingart, Dan Journal of The Electrochemical Society, Vol. 165, Issue 8 https://doi.org/10.1149/2.0181808jes	journal	January 2018
Atomic Layer Deposition of Functional Layers for on Chip 3D Li-Ion All Solid State Microbattery Létiche, Manon; Eustache, Etienne; Freixas, Jeremy Advanced Energy Materials, Vol. 7, Issue 2 https://doi.org/10.1002/aenm.201601402	journal	October 2016
Atomic Layer Deposition of the Solid Electrolyte LiPON Kozen, Alexander C.; Pearse, Alexander J.; Lin, Chuan-Fu Chemistry of Materials, Vol. 27, Issue 15 https://doi.org/10.1021/acs.chemmater.5b01654	journal	July 2015
Atomic layer deposited Li4Ti5O12 on nitrogen-doped carbon nanotubes Meng, Xiangbo; Liu, Jian; Li, Xifei RSC Advances, Vol. 3, Issue 20 https://doi.org/10.1039/c3ra00033h	journal	January 2013
Three-Dimensional Solid-State Lithium-Ion Batteries Fabricated by Conformal Vapor-Phase Chemistry Pearse, Alexander; Schmitt, Thomas; Sahadeo, Emily ACS Nano, Vol. 12, Issue 5 https://doi.org/10.1021/acsnano.7b08751	journal	April 2018
Advances in 3D Thin‐Film Li‐Ion Batteries Moitzheim, Sébastien; Put, Brecht; Vereecken, Philippe M. Advanced Materials Interfaces, Vol. 6, Issue 15 https://doi.org/10.1002/admi.201900805	journal	June 2019
Atomic Layer Deposition of the Solid Electrolyte Garnet Li ₇ La ₃ Zr ₂ O ₁₂ Kazyak, Eric; Chen, Kuan-Hung; Wood, Kevin N. Chemistry of Materials, Vol. 29, Issue 8 https://doi.org/10.1021/acs.chemmater.7b00944	journal	April 2017
Atomic layer deposition of titanium nitride from TDMAT precursor Musschoot, J.; Xie, Q.; Deduytsche, D. Microelectronic Engineering, Vol. 86, Issue 1 https://doi.org/10.1016/j.mee.2008.09.036	journal	January 2009
Atomic Layer Deposition of a Nanometer-Thick Li ₃ PO ₄ Protective Layer on LiNi _0.5 Mn _1.5 O ₄ Films: Dream or Reality for Long-Term Cycling? Hallot, Maxime; Caja-Munoz, Borja; Leviel, Clement ACS Applied Materials & Interfaces, Vol. 13, Issue 13 https://doi.org/10.1021/acsami.0c21961	journal	March 2021
Three-Dimensional Battery Architectures Long, Jeffrey W.; Dunn, Bruce; Rolison, Debra R. Chemical Reviews, Vol. 104, Issue 10, p. 4463-4492 https://doi.org/10.1021/cr020740l	journal	October 2004
Three-dimensional thin-film Li-ion microbatteries for autonomous MEMS Nathan, M.; Golodnitsky, D.; Yufit, V. Journal of Microelectromechanical Systems, Vol. 14, Issue 5 https://doi.org/10.1109/JMEMS.2005.851860	journal	October 2005
Characterization of Sputter‐Deposited LiMn2 O 4 Thin Films for Rechargeable Microbatteries Hwang, K. ‐H.; Lee, S. ‐H.; Joo, S. ‐K. Journal of The Electrochemical Society, Vol. 141, Issue 12 https://doi.org/10.1149/1.2059329	journal	December 1994
Distributed Optimization for Nonrigid Nano-Tomography Nikitin, Viktor; De Andrade, Vincent; Slyamov, Azat IEEE Transactions on Computational Imaging, Vol. 7 https://doi.org/10.1109/TCI.2021.3060915	journal	January 2021
Unveiling the critical role of interfacial ionic conductivity in all-solid-state lithium batteries Wang, Changhong; Liang, Jianwen; Hwang, Sooyeon Nano Energy, Vol. 72 https://doi.org/10.1016/j.nanoen.2020.104686	journal	June 2020
Progress in three-dimensional (3D) Li-ion microbatteries Golodnitsky, D.; Nathan, M.; Yufit, V. Solid State Ionics, Vol. 177, Issue 26-32 https://doi.org/10.1016/j.ssi.2006.02.048	journal	October 2006
Chlorine Doping of Amorphous TiO ₂ for Increased Capacity and Faster Li ⁺ -Ion Storage Moitzheim, Sébastien; Balder, Joan Elisabeth; Poodt, Paul Chemistry of Materials, Vol. 29, Issue 23 https://doi.org/10.1021/acs.chemmater.7b03478	journal	November 2017
Suppression of Jahn–Teller distortion of spinel LiMn2O4 cathode Li, Xifei; Xu, Youlong; Wang, Chunlei Journal of Alloys and Compounds, Vol. 479, Issue 1-2 https://doi.org/10.1016/j.jallcom.2008.12.081	journal	June 2009
The Spinel Phase of LiMn[sub 2]O[sub 4] as a Cathode in Secondary Lithium Cells Tarascon, J. M. Journal of The Electrochemical Society, Vol. 138, Issue 10 https://doi.org/10.1149/1.2085330	journal	January 1991
Synthesis of T-Nb2O5 thin-films deposited by Atomic Layer Deposition for miniaturized electrochemical energy storage devices Ouendi, Saliha; Arico, Cassandra; Blanchard, Florent Energy Storage Materials, Vol. 16 https://doi.org/10.1016/j.ensm.2018.08.022	journal	January 2019
Lithium insertion into manganese spinels Thackeray, M. M.; David, W. I. F.; Bruce, P. G. Materials Research Bulletin, Vol. 18, Issue 4, p. 461-472 https://doi.org/10.1016/0025-5408(83)90138-1	journal	April 1983
Silicon-Microtube Scaffold Decorated with Anatase TiO ₂ as a Negative Electrode for a 3D Litium-Ion Microbattery Eustache, Etienne; Tilmant, Pascal; Morgenroth, Laurence Advanced Energy Materials, Vol. 4, Issue 8 https://doi.org/10.1002/aenm.201301612	journal	January 2014
Growth of manganese oxide thin films by atomic layer deposition Nilsen, O.; Fjellvåg, H.; Kjekshus, A. Thin Solid Films, Vol. 444, Issue 1-2 https://doi.org/10.1016/S0040-6090(03)01101-5	journal	November 2003
An all-in-one nanopore battery array Liu, Chanyuan; Gillette, Eleanor I.; Chen, Xinyi Nature Nanotechnology, Vol. 9, Issue 12 https://doi.org/10.1038/nnano.2014.247	journal	November 2014
Sputtered LiNi _0.5 Mn _1.5 O ₄ Thin Films for Lithium-Ion Microbatteries Hallot, Maxime; Roussel, Pascal; Lethien, Christophe ACS Applied Energy Materials, Vol. 4, Issue 4 https://doi.org/10.1021/acsaem.0c02831	journal	April 2021
Deposition of MnO Anode and MnO ₂ Cathode Thin Films by Plasma Enhanced Atomic Layer Deposition Using the Mn(thd) ₃ Precursor Mattelaer, Felix; Vereecken, Philippe M.; Dendooven, Jolien Chemistry of Materials, Vol. 27, Issue 10 https://doi.org/10.1021/acs.chemmater.5b00255	journal	May 2015
Atomic Layer Deposition of Lithium Phosphorus Oxynitride Nisula, Mikko; Shindo, Yohei; Koga, Hideyuki Chemistry of Materials, Vol. 27, Issue 20 https://doi.org/10.1021/acs.chemmater.5b02199	journal	October 2015
Plasma enhanced atomic layer deposition of thin film Li _1+x Mn _2−x O ₄ for realization of all solid-state 3D lithium-ion microbatteries Sheil, Ryan; Butts, Danielle; Jungjohann, Katherine Journal of Vacuum Science & Technology A, Vol. 39, Issue 1 https://doi.org/10.1116/6.0000644	journal	January 2021
Tuning the Cation Ordering with the Deposition Pressure in Sputtered LiMn _1.5 Ni _0.5 O ₄ Thin Film Deposited on Functional Current Collectors for Li-Ion Microbattery Applications Létiche, Manon; Hallot, Maxime; Huvé, Marielle Chemistry of Materials, Vol. 29, Issue 14 https://doi.org/10.1021/acs.chemmater.7b01921	journal	June 2017
Electrochemical behaviour of sputtered c-V2O5 and LiCoO2 thin films for solid state lithium microbatteries Navone, C.; Tintignac, S.; Pereira-Ramos, J. P. Solid State Ionics, Vol. 192, Issue 1 https://doi.org/10.1016/j.ssi.2010.04.023	journal	June 2011
Challenges and prospects of 3D micro-supercapacitors for powering the internet of things Lethien, Christophe; Le Bideau, Jean; Brousse, Thierry Energy & Environmental Science, Vol. 12, Issue 1 https://doi.org/10.1039/C8EE02029A	journal	January 2019
Atomic Layer Deposition of Spinel Lithium Manganese Oxide by Film-Body-Controlled Lithium Incorporation for Thin-Film Lithium-Ion Batteries Miikkulainen, Ville; Ruud, Amund; Østreng, Erik The Journal of Physical Chemistry C, Vol. 118, Issue 2 https://doi.org/10.1021/jp409399y	journal	December 2013
High Areal Energy Density 3D Lithium-Ion Microbatteries Hur, Janet I.; Smith, Leland C.; Dunn, Bruce Joule, Vol. 2, Issue 6 https://doi.org/10.1016/j.joule.2018.04.002	journal	June 2018
Atomic Layer Deposition of LiCoO ₂ Thin-Film Electrodes for All-Solid-State Li-Ion Micro-Batteries Donders, M. E.; Arnoldbik, W. M.; Knoops, H. C. M. Journal of The Electrochemical Society, Vol. 160, Issue 5 https://doi.org/10.1149/2.011305jes	journal	January 2013
Fast X‐ray Nanotomography with Sub‐10 nm Resolution as a Powerful Imaging Tool for Nanotechnology and Energy Storage Applications De Andrade, Vincent; Nikitin, Viktor; Wojcik, Michael Advanced Materials, Vol. 33, Issue 21 https://doi.org/10.1002/adma.202008653	journal	April 2021
Atomic layer deposition of lithium phosphates as solid-state electrolytes for all-solid-state microbatteries Wang, Biqiong; Liu, Jian; Sun, Qian Nanotechnology, Vol. 25, Issue 50 https://doi.org/10.1088/0957-4484/25/50/504007	journal	November 2014
Rational Design of Atomic-Layer-Deposited LiFePO ₄ as a High-Performance Cathode for Lithium-Ion Batteries Liu, Jian; Banis, Mohammad N.; Sun, Qian Advanced Materials, Vol. 26, Issue 37 https://doi.org/10.1002/adma.201401805	journal	July 2014
The Li-Ion Rechargeable Battery: A Perspective Goodenough, John B.; Park, Kyu-Sung Journal of the American Chemical Society, Vol. 135, Issue 4 https://doi.org/10.1021/ja3091438	journal	January 2013
Sputtered LiMn1.5Ni0.5O4 thin films for Li-ion micro-batteries with high energy and rate capabilities Hallot, Maxime; Demortière, Arnaud; Roussel, Pascal Energy Storage Materials, Vol. 15 https://doi.org/10.1016/j.ensm.2018.08.012	journal	November 2018
An Artificial Solid Electrolyte Interphase Enables the Use of a LiNi _0.5 Mn _1.5 O ₄ 5 V Cathode with Conventional Electrolytes Li, Juchuan; Baggetto, Loïc; Martha, Surendra K. Advanced Energy Materials, Vol. 3, Issue 10 https://doi.org/10.1002/aenm201300378	journal	August 2013

Similar Records

LiMn{sub 2}O{sub 4} nanorod arrays: A potential three-dimensional cathode for lithium-ion microbatteries

Journal Article · Tue Sep 15 00:00:00 EDT 2015 · Materials Research Bulletin · OSTI ID:1882425

Tang, Xiao; Lin, Binghui; Ge, Yong; +5 more

Plasma enhanced atomic layer deposition of thin film Li_1+xMn_2-xO₄ for realization of all solid-state 3D lithium-ion microbatteries

Journal Article · Mon Dec 21 00:00:00 EST 2020 · Journal of Vacuum Science and Technology A · OSTI ID:1882425

Sheil, Ryan; Butts, Danielle; Jungjohann, Katherine; +3 more

Band diagram and rate analysis of thin film spinel LiMn₂O₄ formed by electrochemical conversion of ALD-grown MnO

Journal Article · Thu Sep 22 00:00:00 EDT 2016 · Advanced Functional Materials · OSTI ID:1882425

Young, Matthias J.; Schnabel, Hans-Dieter; Holder, Aaron M.; +2 more

Related Subjects

59 BASIC BIOLOGICAL SCIENCES
3D Li-ion micro-batteries
Atomic Layer Deposition
LiMn2O4
high capacity
thin films

Title: 3D LiMn2O4nThin Film Deposited by ALD: A Road toward High-Capacity Electrode for 3D Li-Ion Microbatteries

Citation Formats

References (39)

Similar Records

Related Subjects

Title: 3D LiMn₂O₄nThin Film Deposited by ALD: A Road toward High-Capacity Electrode for 3D Li-Ion Microbatteries