skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Growth of coincident site lattice matched semiconductor layers and devices on crystalline substrates

Patent ·
OSTI ID:1092976

Methods of fabricating a semiconductor layer or device and said devices are disclosed. The methods include but are not limited to providing a substrate having a crystalline surface with a known lattice parameter (a). The method further includes growing a crystalline semiconductor layer on the crystalline substrate surface by coincident site lattice matched epitaxy, without any buffer layer between the crystalline semiconductor layer and the crystalline surface of the substrate. The crystalline semiconductor layer will be prepared to have a lattice parameter (a') that is related to the substrate lattice parameter (a). The lattice parameter (a') maybe related to the lattice parameter (a) by a scaling factor derived from a geometric relationship between the respective crystal lattices.

Research Organization:
National Renewable Energy Laboratory (NREL), Golden, CO (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC36-08GO28308
Assignee:
Alliance for Sustainable Energy, LLC (Golden, CO)
Patent Number(s):
8,507,365
Application Number:
12/643,127
OSTI ID:
1092976
Country of Publication:
United States
Language:
English

References (94)

Thin film poly III–V space solar cells conference May 2008
Low cost, single crystal-like substrates for practical, high efficiency solar cells conference January 1997
Nitride semiconductor light emitting element and optical device containing it patent March 2006
Room-Temperature Epitaxial Growth of GaN on Atomically Flat MgAl 2 O 4 Substrates by Pulsed-Laser Deposition journal April 2006
High efficiency, monolithic multijunction solar cells containing lattice-mismatched materials and methods of forming same patent October 2005
Properties of epitaxial GaN on refractory metal substrates journal February 2007
Epitaxy of Dissimilar Materials journal August 1995
Zymomonas pentose-sugar fermenting strains and uses thereof patent-application August 2003
Nucleation and growth of epitaxial ZrB2(0001) on Si(111) journal July 2004
Triple-Junction III–V Based Concentrator Solar Cells: Perspectives and Challenges journal April 2006
Method for rapid, controllable growth and thickness, of epitaxial silicon films patent October 2009
Multi-junction, monolithic solar cell using low-band-gap materials lattice matched to GaAs or Ge patent August 2001
Reflection high-energy electron diffraction studies of epitaxial oxide seed-layer growth on rolling-assisted biaxially textured substrate Ni(001): The role of surface structure and chemistry journal November 2001
Epitaxial growth of AlN films on single-crystalline Ta substrates journal August 2007
Magnetic particle-based therapy patent-application February 2006
Lattice Parameters and Local Lattice Distortions in fcc-Ni Solutions journal April 2007
Growth of InN films on spinel substrates by pulsed laser deposition journal October 2007
Domain epitaxy: A unified paradigm for thin film growth journal January 2003
Photonic biasing and integrated solar charging networks for integrated circuits patent-application January 2003
Surfactant Assisted Growth in Barrier Layers In Inverted Metamorphic Multijunction Solar Cells patent-application March 2009
Microstructure evolution of GaN buffer layer on MgAl2O4 substrate journal October 1998
Rare Earth Elements—Critical Resources for High Technology report November 2002
High-efficiency GaInP∕GaAs∕InGaAs triple-junction solar cells grown inverted with a metamorphic bottom junction journal July 2007
Epitaxial growth of GaAs/NiAl/GaAs heterostructures journal April 1988
General orientational characteristics of heteroepitaxial layers of AIIBVI semiconductors on sapphire and semiconductor substrates with diamond and sphalerite structures (AIIIBV) journal May 2002
The growth of epitaxial aluminium on As containing compound semiconductors journal January 1999
Epitaxial growth of single-crystalline AlN films on tungsten substrates journal December 2006
Investigation into the influence of buffer and nitrided layers on the initial stages of GaN growth on InSb (100) journal October 2000
Growth of GaAs‐Al‐GaAs by migration‐enhanced epitaxy journal December 1988
Nitride-based semiconductor element and method of forming nitride-based semiconductor patent July 2004
On an unusual azimuthal orientational relationship in the system gallium nitride layer on spinel substrate journal March 2000
Technique for the growth of planar semi-polar gallium nitride patent May 2007
Method for producing multijunction solar cell patent November 2009
Miniature self-pumped monolithically integrated solid state laser patent August 1998
Growth and properties of GaN and AlN layers on silver substrates journal November 2005
Material considerations for terawatt level deployment of photovoltaics journal February 2008
Transmission electron microscope study on electrodeposited Gd2O3 and Gd2Zr2O7 buffer layers for YBa2Cu3O7−δ superconductors journal July 2008
Band parameters for nitrogen-containing semiconductors journal September 2003
Method of treating lignocellulose materials to produce ruminant feed patent January 1979
Time-resolved photoluminescence of polycrystalline GaN layers on metal substrates journal August 2002
MBE growth of GaN on MgO substrate journal April 2007
Fabrication of AlAs/Al/AlAs heterostructures by molecular beam epitaxy and migration enhanced epitaxy journal May 1991
Single‐crystal‐aluminum Schottky‐barrier diodes prepared by molecular‐beam epitaxy (MBE) on GaAs journal June 1978
Lattice-matched HfN buffer layers for epitaxy of GaN on Si journal August 2002
InGaN‐GaN based light‐emitting diodes over (111) spinel substrates journal July 1996
Characterization of Planar Semipolar Gallium Nitride Films on Spinel Substrates journal July 2005
Room temperature green light emission from nonpolar cubic InGaN∕GaN multi-quantum-wells journal February 2007
Epitaxial growth and characterization of GaAs/Al/GaAs heterostructures journal April 1990
Aligned-Crystalline Si Films on Non-Single-Crystalline Substrates journal January 2008
Initial stages of InN thin film growth onto MgAl2O4(111) and α-Al2O3(00·1) substrates journal December 2000
Spinel substrate and heteroepitaxial growth of III-V materials thereon patent January 2005
[100] Or [110] aligned, semiconductor-based, large-area, flexible, electronic devices patent-application September 2008
Heteroepitaxy of dissimilar materials: effect of interface structure on strain and defect formation journal March 2002
New frontiers in thin film growth and nanomaterials journal February 2005
Bowing parameter of zincblende InxGa1−xN journal December 2007
Group-III nitride semiconductor light-emitting device and production method thereof patent May 2007
Light emitting apparatus and method of manufacturing the same patent June 2008
The Promise and Challenge of Solid-State Lighting journal December 2001
40.8% efficient inverted triple-junction solar cell with two independently metamorphic junctions journal September 2008
The RABiTS Approach: Using Rolling-Assisted Biaxially Textured Substrates for High-Performance YBCO Superconductors journal August 2004
Epitaxial growth of AlN on Cu(111) substrates using pulsed laser deposition journal April 2006
GdN (111) heteroepitaxy on GaN (0001) by N2 plasma and NH3 molecular beam epitaxy journal February 2009
Gas source molecular beam epitaxy of GaN with hydrazine on spinel substrates journal May 1998
Epitaxial growth of InN on nearly lattice-matched (Mn,Zn)Fe2O4 journal January 2006
Cleaved cavity optically pumped InGaN–GaN laser grown on spinel substrates journal October 1996
Epitaxial growth of GaN on copper substrates journal June 2006
Growth and characterization of epitaxial Fe[sub x]Al[sub 1−x]/(In,Al)As/InP and III–V/Fe[sub x]Al[sub 1−x]/(In,Al)As/InP structures
  • Sacks, R. N.; Qin, L.; Jazwiecki, M.
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 17, Issue 3 https://doi.org/10.1116/1.590742
journal January 1999
Bipolar transistor, semiconductor light emitting device and semiconductor device patent December 2002
Suppression of domain formation in GaN layers grown on Ge(111) journal February 2009
Increasing cube texture in high purity aluminium foils for capacitors journal December 2005
Alumina-rich spinel: A new substrate for the growth of high quality GaN-based light-emitting diodes journal December 2005
Growth and characterization of GaAs/Al/GaAs heterostructures journal April 1990
Research challenges to ultra-efficient inorganic solid-state lighting journal December 2007
Light Emitting Device patent-application February 2009
Morphological and chemical considerations for the epitaxy of metals on semiconductors journal January 1984
Metal-oxide interfaces at the nanoscale journal June 2009
III N V semiconductors for solar photovoltaic applications journal July 2002
Mg-doped green light emitting diodes over cubic (111) MgAl2O4 substrates journal March 1997
Epitaxial growth in large‐lattice‐mismatch systems journal January 1994
Bipolar transistor, semiconductor light emitting device and semiconductor device patent August 2003
Semiconductor-based, large-area, flexible, electronic devices on <100> oriented substrates patent-application October 2008
Epitaxial relationships between Al, Ag and GaAs{001} surfaces journal January 1982
Epitaxial metal(NiAl)-semiconductor(III–V) heterostructures by MBE journal April 1990
Properties of GaN epitaxial layer grown on (111) MgAl2O4 substrate journal February 1997
Novel symmetry in the growth of gallium nitride on magnesium aluminate substrates journal January 1996
Photoluminescence measurements on cubic InGaN layers deposited on a SiC substrate journal May 2006
Cubic-on-cubic growth of a MgO(001) thin film prepared on Si(001) substrate at low ambient pressure by the sputtering method journal January 2008
Epitaxial YBa2Cu3O7 on Biaxially Textured Nickel (001): An Approach to Superconducting Tapes with High Critical Current Density journal November 1996
Method for making optoelectronic and microelectronic devices including cubic ZnMgO and/or CdMgO alloys patent February 2003
Strong photoluminescence emission from polycrystalline GaN layers grown on W, Mo, Ta, and Nb metal substrates journal May 2001
40% efficient metamorphic GaInP∕GaInAs∕Ge multijunction solar cells journal April 2007
Multi-junction photovoltaic cell having buffer layers for the growth of single crystal boron compounds patent October 2006
Group-III nitride based light emitter patent August 1998
Epitaxial growth of group III nitrides on silicon substrates via a reflective lattice-matched zirconium diboride buffer layer journal April 2003