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Title: The proposed Institute for Micro-manufacturing, Louisiana Tech University

Technical Report ·
DOI:https://doi.org/10.2172/10106197· OSTI ID:10106197

The Department of Energy (DOE) has prepared an Environmental Assessment (EA) DOE/EA-0958, evaluating the construction and equipping of two components of the proposed Institute for Micro-manufacturing at Louisiana Tech University (LTU), a proposed R and D facility to be located in Ruston, LA. and, the proposed installation of a beamline for micro-machining applications at the Center for Advanced Microstructures and Devices (CAMD) facility at Louisiana State University in Baton Rouge, LA. The objective of the proposed project is to focus on the applied, rather than basic research emphasizing the design and development, metrology, inspection and testing, and the assembly and production of micron and submicron structures and devices. Also, the objective of the beamline at CAMD would be the fundamental study of processing and analysis technologies, including x-ray lithography, which are important to microstructures fabrication and electronic device development. Based on the analysis in the EA, the DOE has determined that the proposed action does not constitute a major federal action significantly affecting the quality of the human environment within the meaning of the National Environmental Policy Act of 1969 (NEPA). Therefore, the preparation of an Environmental Impact Statement is not required.

Research Organization:
USDOE Chicago Operations Office, Argonne, IL (United States)
Sponsoring Organization:
USDOE, Washington, DC (United States)
OSTI ID:
10106197
Report Number(s):
DOE/EA-0958; ON: DE95004412; NC: NONE; TRN: AHC29503%%80
Resource Relation:
Other Information: PBD: Jul 1994
Country of Publication:
United States
Language:
English