Accurate hydrogen depth profiling by reflection elastic recoil detection analysis

Conference · Mon Jan 01 00:00:00 EST 2001

DOI:https://doi.org/10.1016/S0168-583X(02)00473-1· OSTI ID:975646

Verda, R D ^[1]; Tesmer, Joseph R; Bower, R W ^[2]

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1. Raymond D.
2. Robert W.

A technique to convert reflection elastic recoil detection analysis spectra to depth profiles, the channel-depth conversion, was introduced by Verda, et al [1]. But the channel-depth conversion does not correct for energy spread, the unwanted broadening in the energy of the spectra, which can lead to errors in depth profiling. A work in progress introduces a technique that corrects for energy spread in elastic recoil detection analysis spectra, the energy spread correction [2]. Together, the energy spread correction and the channel-depth conversion comprise an accurate and convenient hydrogen depth profiling method.

• Research Organization: Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
• Sponsoring Organization: USDOE
• OSTI ID: 975646
• Report Number(s): LA-UR-01-3955; TRN: US201008%%370
• Resource Relation: Journal Volume: 190; Journal Issue: 1-4; Conference: Submitted to: 15th International Conference on Ion Beam Analysis, July 15-20, 2001, Cairns, Australia
• Country of Publication: United States
• Language: English

Related Subjects

08 HYDROGEN
DETECTION
HYDROGEN
ION BEAMS
REFLECTION
SPECTRA