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Title: Pulsed DC deposition of near-frictionless carbon. Final CRADA report.

Technical Report ·
DOI:https://doi.org/10.2172/975018· OSTI ID:975018

Near-Frictionless Carbon (NFC) coatings, CemeCon, Inc. arranged for the loan of a Pinnacle Plus pulsed DC power supply with ancillary support equipment and appropriate sputter targets for the deposition of CemeCon's graded Cr-based bond coat. A process engineer from CemeCon AG also came to Argonne to install and operate the new power supply, and work with ANL scientists on process development. By any measure, these results are extremely encouraging. It has now been established that NFC coatings can be deposited in the CemeCon CC800/9sx unit using pulsed DC to generate the plasma, and further that the DLC3000 bond coat technology can be used with PACVD coatings. In terms of process variables, it should be possible to increase the deposition rate by increasing either or both the deposition pressure and/or the pulsed bias voltage without adversely affecting the coating quality. Other structural characterization may be performed on the coatings, including fluctuation microscopy, ultraviolet Raman spectroscopy, and near-edge x-ray absorption fine structure spectroscopy.

Research Organization:
Argonne National Lab. (ANL), Argonne, IL (United States)
Sponsoring Organization:
USDOE Office of Science (SC)
DOE Contract Number:
DE-AC02-06CH11357
OSTI ID:
975018
Report Number(s):
ANL/ES-C0001101; TRN: US201008%%436
Country of Publication:
United States
Language:
ENGLISH