Fabrication of 10nm diameter carbon nanopores
Journal Article
·
· Applied Physics Letters
OSTI ID:974547
The addition of carbon to samples, during imaging, presents a barrier to accurate TEM analysis, the controlled deposition of hydrocarbons by a focused electron beam can be a useful technique for local nanometer-scale sculpting of material. Here we use hydrocarbon deposition to form nanopores from larger focused ion beam (FIB) holes in silicon nitride membranes. Using this method, we close 100-200nm diameter holes to diameters of 10nm and below, with deposition rates of 0.6nm per minute. I-V characteristics of electrolytic flow through these nanopores agree quantitatively with a one dimensional model at all examined salt concentrations.
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- Life Sciences Division; Physical Biosciences Division
- DOE Contract Number:
- DE-AC02-05CH11231
- OSTI ID:
- 974547
- Report Number(s):
- LBNL-2775E; APPLAB; TRN: US201007%%794
- Journal Information:
- Applied Physics Letters, Journal Name: Applied Physics Letters; ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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