Metallic coatings on silicon substrates, and methods of forming metallic coatings on silicon substrates
- Idaho Falls, ID
- Los Alamos, NM
The invention includes methods of forming a metallic coating on a substrate which contains silicon. A metallic glass layer is formed over a silicon surface of the substrate. The invention includes methods of protecting a silicon substrate. The substrate is provided within a deposition chamber along with a deposition target. Material from the deposition target is deposited over at least a portion of the silicon substrate to form a protective layer or structure which contains metallic glass. The metallic glass comprises iron and one or more of B, Si, P and C. The invention includes structures which have a substrate containing silicon and a metallic layer over the substrate. The metallic layer contains less than or equal to about 2 weight % carbon and has a hardness of at least 9.2 GPa. The metallic layer can have an amorphous microstructure or can be devitrified to have a nanocrystalline microstructure.
- Research Organization:
- Idaho National Laboratory (INL), Idaho Falls, ID (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC07-99ID13727
- Assignee:
- Battelle Energy Alliance, LLC (Idaho Falls, ID)
- Patent Number(s):
- 7,341,765
- Application Number:
- 10/918,287
- OSTI ID:
- 970494
- Country of Publication:
- United States
- Language:
- English
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