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Title: Backfilled, self-assembled monolayers and methods of making same

Patent ·
OSTI ID:968972
 [1];  [2];  [3];  [4];  [2];  [5];  [6]
  1. Kennewick, WA
  2. Richland, WA
  3. Benton City, WA
  4. Sequim, WA
  5. Raleigh, NC
  6. West Richland, WA
+ Show Author Affiliations

Backfilled, self-assembled monolayers and methods of making the same are disclosed. The self-assembled monolayer comprises at least one functional organosilane species and a substantially random dispersion of at least one backfilling organosilane species among the functional organosilane species, wherein the functional and backfilling organosilane species have been sequentially deposited on a substrate. The method comprises depositing sequentially a first organosilane species followed by a backfilling organosilane species, and employing a relaxation agent before or during deposition of the backfilling organosilane species, wherein the first and backfilling organosilane species are substantially randomly dispersed on a substrate.

Research Organization:
Pacific Northwest National Laboratory (PNNL), Richland, WA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC05-76RL01830
Assignee:
Battelle Memorial Institute (Richland, WA)
Patent Number(s):
7,553,547
Application Number:
11/315,646
OSTI ID:
968972
Country of Publication:
United States
Language:
English

References (5)

Deposition of Self-Assembled Monolayers in Mesoporous Silica from Supercritical Fluids journal December 2001
Micropatterning organosilane self-assembled monolayers with plasma etching and backfilling techniques
  • Harant, Adam W.; Whipple, Stephen G.; Douglas, Kenneth
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 23, Issue 2 https://doi.org/10.1116/1.1861041
journal January 2005
Formation of Nanometer Domains of One Chemical Functionality in a Continuous Matrix of a Second Chemical Functionality by Sequential Adsorption of Silane Self-Assembled Monolayers journal December 2001
Binary self-assembled monolayers as prepared by successive adsorption of alkyltrichlorosilanes journal December 1993
Functionalized Monolayers on Ordered Mesoporous Supports journal May 1997

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Related Subjects

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY