Method and Apparatus for Creating a Topography at a Surface

Patent · Tue Nov 11 00:00:00 EST 2008

OSTI ID:953736

Adams, David P ^[1]; Sinclair, Michael B ^[1]; Mayer, Thomas M ^[1]; Vasile, Michael J ^[1]; Sweatt, William C ^[1]

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1. Albuquerque, NM

Methods and apparatus whereby an optical interferometer is utilized to monitor and provide feedback control to an integrated energetic particle column, to create desired topographies, including the depth, shape and/or roughness of features, at a surface of a specimen. Energetic particle columns can direct energetic species including, ions, photons and/or neutral particles to a surface to create features having in-plane dimensions on the order of 1 micron, and a height or depth on the order of 1 nanometer. Energetic processes can include subtractive processes such as sputtering, ablation, focused ion beam milling and, additive processes, such as energetic beam induced chemical vapor deposition. The integration of interferometric methods with processing by energetic species offers the ability to create desired topographies at surfaces, including planar and curved shapes.

• Research Organization: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: AC04-94AL85000
• Assignee: Sandia Corporation (Albuquerque, NM)
• Patent Number(s): 7,449,699
• Application Number: 11/478,573
• OSTI ID: 953736
• Country of Publication: United States
• Language: English