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Title: Low-loss LIGA-micromachined conductor-backed coplanar waveguide.

Technical Report ·
DOI:https://doi.org/10.2172/920817· OSTI ID:920817

A mesoscale low-loss LIGA-micromachined conductor-backed coplanar waveguide is presented. The 517 {micro}m lines are the tallest uniplanar LIGA-fabricated microwave transmission lines to date, as well as the first to be constructed of copper rather than nickel. The conductor-backed micromachined CPW on quartz achieves a measured attenuation of 0.064 dB/cm at 15.5 GHz.

Research Organization:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
920817
Report Number(s):
SAND2004-5621; TRN: US200803%%116
Country of Publication:
United States
Language:
English