Binary pseudo-random grating as a standard test surface formeasurement of modulation transfer function of interferometricmicroscopes
The task of designing high performance X-ray optical systemsrequires the development of sophisticated X-ray scattering calculationsbased on rigorous information about the optics. One of the mostinsightful approaches to these calculations is based on the powerspectral density (PSD) distribution of the surface height. The majorproblem of measurement of a PSD distribution with an interferometricand/or atomic force microscope arises due to the unknown ModulationTransfer Function (MTF) of the instruments. The MTF characterizes theperturbation of the PSD distribution at higher spatial frequencies. Here,we describe a new method and dedicated test surfaces for calibration ofthe MTF of a microscope. The method is based on use of a speciallydesigned Binary Pseudo-random (BPR) grating. Comparison of atheoretically calculated PSD spectrum of a BPR grating with a spectrummeasured with the grating provides the desired calibration of theinstrumental MTF. The theoretical background of the method, as well asresults of experimental investigations are presented.
- Research Organization:
- Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- USDOE Director. Office of Science. Basic EnergySciences
- DOE Contract Number:
- DE-AC02-05CH11231
- OSTI ID:
- 919268
- Report Number(s):
- LBNL-63257; R&D Project: 458117; BnR: KC0204016; TRN: US200822%%204
- Resource Relation:
- Conference: SPIE Optics and Photonics 2007: TechnicalConference OP07O: 'Optical Engineering and Applications:' Conference 6704'Advances in Metrology for X-ray and EUV Optics II', San Diego, CA,August 26-30, 2007
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
42 ENGINEERING
CALIBRATION
DISTRIBUTION
MICROSCOPES
MODULATION
OPTICAL SYSTEMS
OPTICS
PERFORMANCE
SCATTERING
SPECTRAL DENSITY
TRANSFER FUNCTIONS
standard test surface interferometric microscope modulationtransfer function power spectral density optical metrology calibrationerror reduction