Vacuum compatible, high-speed, 2-D mirror tilt stage
Patent
·
OSTI ID:916927
- Crockett, CA
A compact and vacuum compatible magnetic-coil driven tiltable stage that is equipped with a high efficiency reflective coating can be employed as a scanner in EUV applications. The drive electronics for the scanner is fully in situ programmable and rapidly switchable.
- Research Organization:
- Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC03-76SF00098
- Assignee:
- Euv LLC (Santa Clara, CA)
- Patent Number(s):
- 7,273,289
- OSTI ID:
- 916927
- Country of Publication:
- United States
- Language:
- English
Similar Records
Vacuum-compatible pulse selector for free-electron laser
Vacuum-compatible standard diffuse source, manufacture and calibration
Ultra-High Vacuum Compatible Optical Chopper System for Synchrotron X-ray Scanning Tunneling Microscopy
Journal Article
·
Tue Sep 15 00:00:00 EDT 2009
· Review of Scientific Instruments
·
OSTI ID:916927
+1 more
Vacuum-compatible standard diffuse source, manufacture and calibration
Conference
·
Mon Mar 01 00:00:00 EST 1999
·
OSTI ID:916927
+2 more
Ultra-High Vacuum Compatible Optical Chopper System for Synchrotron X-ray Scanning Tunneling Microscopy
Conference
·
Thu Jan 01 00:00:00 EST 2015
·
OSTI ID:916927
+7 more