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Title: PV Reflectometer: A Process Monitoring Tool for Solar Cell Manufacturing

Conference ·
OSTI ID:909226

A new instrument is described for in-line monitoring of various process steps in silicon solar-cell fabrication.

Research Organization:
National Renewable Energy Lab. (NREL), Golden, CO (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC36-99-GO10337
OSTI ID:
909226
Resource Relation:
Conference: Program and Proceedings: NCPV Program Review Meeting 2000, 16-19 April 2000, Denver, Colorado; NREL/BK-520-28064
Country of Publication:
United States
Language:
English