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Title: Producing Solar Cells By Surface Preparation For Accelerated Nucleation Of Microcrystalline Silicon On Heterogeneous Substrates.

Patent ·
OSTI ID:879359

Attractive multi-junction solar cells and single junction solar cells with excellent conversion efficiency can be produced with a microcrystalline tunnel junction, microcrystalline recombination junction or one or more microcrystalline doped layers by special plasma deposition processes which includes plasma etching with only hydrogen or other specified etchants to enhance microcrystalline growth followed by microcrystalline. nucleation with a doped hydrogen-diluted feedstock.

Research Organization:
National Renewable Energy Laboratory (NREL), Golden, CO (United States)
DOE Contract Number:
ZM-0-19033-1
Assignee:
Amoco/Enron Solar (Newtown, PA)
Patent Number(s):
US 5,730,808
Application Number:
08/672110
OSTI ID:
879359
Country of Publication:
United States
Language:
English