LIGA-based microsystem manufacturing:the electrochemistry of through-mold depostion and material properties.

Technical Report · Wed Jun 01 00:00:00 EDT 2005

DOI:https://doi.org/10.2172/876336· OSTI ID:876336

Kelly, James J ^[1]; Goods, Steven Howard ^[2]

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1. Sandia National Laboratories, Livermore, CA
2. Sandia National Laboratories, Livermore, CA

The report presented below is to appear in ''Electrochemistry at the Nanoscale'', Patrik Schmuki, Ed. Springer-Verlag, (ca. 2005). The history of the LIGA process, used for fabricating dimensional precise structures for microsystem applications, is briefly reviewed, as are the basic elements of the technology. The principal focus however, is on the unique aspects of the electrochemistry of LIGA through-mask metal deposition and the generation of the fine and uniform microstructures necessary to ensure proper functionality of LIGA components. We draw from both previously published work by external researchers in the field as well as from published and unpublished studies from within Sandia.

• Research Organization: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
• Sponsoring Organization: USDOE
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 876336
• Report Number(s): SAND2005-2537; TRN: US200606%%121
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
DEPOSITION
ELECTROCHEMISTRY
MICROELECTRONICS
MANUFACTURING
NANOSTRUCTURES
MASKING
Electrochemistry.
Microstructure-Materials-Analysis.
LIGA.