Surface-micromachined microfluidic devices

Patent · Wed Jan 01 00:00:00 EST 2003

OSTI ID:875124

Galambos, Paul C ^[1]; Okandan, Murat ^[1]; Montague, Stephen ^[1]; Smith, James H ^[2]; Paul, Phillip H ^[3]; Krygowski, Thomas W ^[4]; Allen, James J ^[1]; Nichols, Christopher A ^[5]

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1. Albuquerque, NM
2. Redmond, WA
3. Livermore, CA
4. Cortlandt Manor, NY
5. Hauppauge, NY

Microfluidic devices are disclosed which can be manufactured using surface-micromachining. These devices utilize an electroosmotic force or an electromagnetic field to generate a flow of a fluid in a microchannel that is lined, at least in part, with silicon nitride. Additional electrodes can be provided within or about the microchannel for separating particular constituents in the fluid during the flow based on charge state or magnetic moment. The fluid can also be pressurized in the channel. The present invention has many different applications including electrokinetic pumping, chemical and biochemical analysis (e.g. based on electrophoresis or chromatography), conducting chemical reactions on a microscopic scale, and forming hydraulic actuators.

• Research Organization: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
• DOE Contract Number: AC04-94AL85000
• Assignee: Sandia Corporation (Albuquerque, NM)
• Patent Number(s): US 6537437
• OSTI ID: 875124
• Country of Publication: United States
• Language: English

Related Subjects

surface-micromachined
microfluidic
devices
disclosed
manufactured
surface-micromachining
utilize
electroosmotic
force
electromagnetic
field
generate
flow
fluid
microchannel
lined
silicon
nitride
additional
electrodes
provided
separating
constituents
based
charge
magnetic
moment
pressurized
channel
applications
including
electrokinetic
pumping
chemical
biochemical
analysis
electrophoresis
chromatography
conducting
reactions
microscopic
scale
forming
hydraulic
actuators
magnetic field
silicon nitride
chemical reaction
chemical analysis
microfluidic devices
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