Scanning evanescent electro-magnetic microscope

Xiang, Xiao-Dong; Gao, Chen; Schultz, Peter G; Wei, Tao

Title: Scanning evanescent electro-magnetic microscope

Patent · Wed Jan 01 00:00:00 EST 2003

OSTI ID:875106

Xiang, Xiao-Dong ^[1]; Gao, Chen ^[2]; Schultz, Peter G ^[3]; Wei, Tao ^[4]

Alameda, CA
Anhui, CN
La Jolla, CA
Sunnyvale, CA

A novel scanning microscope is described that uses near-field evanescent electromagnetic waves to probe sample properties. The novel microscope is capable of high resolution imaging and quantitative measurements of the electrical properties of the sample. The inventive scanning evanescent wave electromagnetic microscope (SEMM) can map dielectric constant, tangent loss, conductivity, complex electrical impedance, and other electrical parameters of materials. The quantitative map corresponds to the imaged detail. The novel microscope can be used to measure electrical properties of both dielectric and electrically conducting materials.

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Research Organization:: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)

DOE Contract Number:: AC03-76SF00098

Assignee:: The Regents of the University of California (Oakland, CA)

Patent Number(s):: US 6532806

OSTI ID:: 875106

Country of Publication:: United States

Language:: English

References (16)

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Scanning tip microwave near‐field microscope Wei, T.; Xiang, X. ‐D.; Wallace‐Freedman, W. G. Applied Physics Letters, Vol. 68, Issue 24 https://doi.org/10.1063/1.115773	journal	June 1996
Quantitative microwave near-field microscopy of dielectric properties Gao, C.; Xiang, X. -D. Review of Scientific Instruments, Vol. 69, Issue 11 https://doi.org/10.1063/1.1149189	journal	November 1998
Near‐field scanning microwave microscope with 100 μm resolution Vlahacos, C. P.; Black, R. C.; Anlage, S. M. Applied Physics Letters, Vol. 69, Issue 21 https://doi.org/10.1063/1.118033	journal	November 1996
Super-resolution Aperture Scanning Microscope Ash, E. A.; Nicholls, G. Nature, Vol. 237, Issue 5357 https://doi.org/10.1038/237510a0	journal	June 1972
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wave
semm
map
dielectric
constant
tangent
loss
conductivity
complex
impedance
parameters
materials
corresponds
imaged
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measure
electrically
conducting
electrically conducting
electromagnetic wave
resolution imaging
quantitative measure
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Title: Scanning evanescent electro-magnetic microscope

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