Optical stress generator and detector

Maris, Humphrey J; Stoner, Robert J

Title: Optical stress generator and detector

Patent · Tue Jan 01 00:00:00 EST 2002

OSTI ID:874491

Maris, Humphrey J ^[1]; Stoner, Robert J ^[2]

Barrington, RI
Duxbury, MA

Disclosed is a system for the characterization of thin films and interfaces between thin films through measurements of their mechanical and thermal properties. In the system light is absorbed in a thin film or in a structure made up of several thin films, and the change in optical transmission or reflection is measured and analyzed. The change in reflection or transmission is used to give information about the ultrasonic waves that are produced in the structure. The information that is obtained from the use of the measurement methods and apparatus of this invention can include: (a) a determination of the thickness of thin films with a speed and accuracy that is improved compared to earlier methods; (b) a determination of the thermal, elastic, and optical properties of thin films; (c) a determination of the stress in thin films; and (d) a characterization of the properties of interfaces, including the presence of roughness and defects.

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Research Organization:: Brown Univ., Providence, RI (United States)

DOE Contract Number:: FG02-86ER45267

Assignee:: Brown University Research Foundation (Providence, RI)

Patent Number(s):: US 6400449

OSTI ID:: 874491

Country of Publication:: United States

Language:: English

References (38)

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Picosecond acoustics as a non-destructive tool for the characterization of very thin films Thomsen, C.; Maris, H. J.; Tauc, J. Thin Solid Films, Vol. 154, Issue 1-2 https://doi.org/10.1016/0040-6090(87)90366-X	journal	November 1987
Sound velocity and index of refraction of AlAs measured by picosecond ultrasonics Grahn, H. T.; Young, D. A.; Maris, H. J. Applied Physics Letters, Vol. 53, Issue 21 https://doi.org/10.1063/1.100309	journal	November 1988
Characterization of Transparent and Opaque thin Films Using Laser Picosecond Ultrasonics Wright, O. B.; Hyoguchi, T.; Kawashima, K. Nondestructive Testing and Evaluation, Vol. 7, Issue 1-6 https://doi.org/10.1080/10589759208952995	journal	June 1992
Carrier lifetime versus ion‐implantation dose in silicon on sapphire Doany, F. E.; Grischkowsky, D.; Chi, C. ‐C. Applied Physics Letters, Vol. 50, Issue 8 https://doi.org/10.1063/1.98173	journal	February 1987
Generation and detection of picosecond acoustic pulses in thin metal films Eesley, Gary L.; Clemens, Bruce M.; Paddock, Carolyn A. Applied Physics Letters, Vol. 50, Issue 12 https://doi.org/10.1063/1.98077	journal	March 1987
Laser Picosecond Acoustics in Various Types of Thin Film Wright, Oliver B.; Hyoguchi, Takao; Kawashima, Katsuhiro Japanese Journal of Applied Physics, Vol. 31, Issue S1 https://doi.org/10.7567/JJAPS.31S1.85	journal	January 1992
Analysis of lattice defects induced by ion implantation with photo‐acoustic displacement measurements Sumie, Shingo; Takamatsu, Hiroyuki; Morimoto, Tsutomu Journal of Applied Physics, Vol. 76, Issue 10 https://doi.org/10.1063/1.357074	journal	November 1994
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Measurements of the Kapitza conductance between diamond and several metals Stoner, R. J.; Maris, H. J.; Anthony, T. R. Physical Review Letters, Vol. 68, Issue 10 https://doi.org/10.1103/PhysRevLett.68.1563	journal	March 1992
High Resolution Laser Picosecond Acoustics in Thin Films Wright, O. B.; Matsumoto, T.; Hyoguchi, T. Physical Acoustics, p. 695-702 https://doi.org/10.1007/978-1-4615-9573-1_94	book	January 1991
Kapitza conductance and heat flow between solids at temperatures from 50 to 300 K Stoner, R. J.; Maris, H. J. Physical Review B, Vol. 48, Issue 22 https://doi.org/10.1103/PhysRevB.48.16373	journal	December 1993
Time-resolved study of vibrations of a -Ge:H/ a -Si:H multilayers Grahn, H. T.; Maris, H. J.; Tauc, J. Physical Review B, Vol. 38, Issue 9 https://doi.org/10.1103/PhysRevB.38.6066	journal	September 1988
Detection of Thin Interfacial Layers by Picosecond Ultrasonics Tas, G.; Stoner, R. J.; Maris, H. J. MRS Proceedings, Vol. 259 https://doi.org/10.1557/PROC-259-231	journal	January 1992
Ultrasonic experiments at ultra-high frequency with picosecond time-resolution Lin, H. -N.; Stoner, R. J.; Maris, H. J. IEEE Symposium on Ultrasonics https://doi.org/10.1109/ULTSYM.1990.171573	conference	January 1990
Thickness and sound velocity measurement in thin transparent films with laser picosecond acoustics Wright, O. B. Journal of Applied Physics, Vol. 71, Issue 4 https://doi.org/10.1063/1.351218	journal	February 1992
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Detection of thermal waves through optical reflectance Rosencwaig, Allan; Opsal, Jon; Smith, W. L. Applied Physics Letters, Vol. 46, Issue 11 https://doi.org/10.1063/1.95794	journal	June 1985
Thermal and plasma wave depth profiling in silicon Opsal, Jon; Rosencwaig, Allan Applied Physics Letters, Vol. 47, Issue 5 https://doi.org/10.1063/1.96105	journal	September 1985
Surface generation and detection of phonons by picosecond light pulses Thomsen, C.; Grahn, H. T.; Maris, H. J. Physical Review B, Vol. 34, Issue 6 https://doi.org/10.1103/PhysRevB.34.4129	journal	September 1986
Measurements of atomic sodium in flames by asynchronous optical sampling: theory and experiment Fiechtner, Gregory J.; King, Galen B.; Laurendeau, Normand M. Applied Optics, Vol. 31, Issue 15 https://doi.org/10.1364/AO.31.002849	journal	January 1992
Phonon attenuation and velocity measurements in transparent materials by picosecond acoustic interferometry Lin, H. ‐N.; Stoner, R. J.; Maris, H. J. Journal of Applied Physics, Vol. 69, Issue 7 https://doi.org/10.1063/1.348958	journal	April 1991
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Attenuation of longitudinal-acoustic phonons in amorphous ${SiO}_{2}$ at frequencies up to 440 GHz Zhu, T. C.; Maris, H. J.; Tauc, J. Physical Review B, Vol. 44, Issue 9 https://doi.org/10.1103/PhysRevB.44.4281	journal	September 1991
Noninvasive picosecond ultrasonic detection of ultrathin interfacial layers: CF _x at the Al/Si interface Tas, G.; Stoner, R. J.; Maris, H. J. Applied Physics Letters, Vol. 61, Issue 15 https://doi.org/10.1063/1.108427	journal	October 1992
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Relationship between Interfacial Strain and the Elastic Response of Multilayer Metal Films Clemens, Bruce M.; Eesley, Gary L. Physical Review Letters, Vol. 61, Issue 20 https://doi.org/10.1103/PhysRevLett.61.2356	journal	November 1988
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Asynchronous optical sampling:a new combustion diagnostic for potential use in turbulent, high-pressure flames Fiechtner, G. J.; Kneisler, R. J.; Lytle, F. E. Optics Letters, Vol. 14, Issue 5 https://doi.org/10.1364/OL.14.000260	journal	January 1989
Picosecond optical studies of amorphous diamond and diamondlike carbon: Thermal conductivity and longitudinal sound velocity Morath, Christopher J.; Maris, Humphrey J.; Cuomo, Jerome J. Journal of Applied Physics, Vol. 76, Issue 5 https://doi.org/10.1063/1.357560	journal	September 1994
Picosecond photoinduced electronic and acoustic effects in a-Si:H based multilayer structures Grahn, H. T.; Vardeny, Z.; Maris, H. J. Journal of Non-Crystalline Solids, Vol. 97-98 https://doi.org/10.1016/0022-3093(87)90205-5	journal	December 1987
Elastic properties of silicon oxynitride films determined by picosecond acoustics Grahn, H. T.; Maris, H. J.; Tauc, J. Applied Physics Letters, Vol. 53, Issue 23 https://doi.org/10.1063/1.100253	journal	December 1988
A New Method of Photothermal Displacement Measurement by Laser Interferometric Probe -Its Mechanism and Applications to Evaluation of Lattice Damage in Semiconductors Sumie, Shingo; Takamatsu, Hiroyuki; Nishimoto, Yoshiro Japanese Journal of Applied Physics, Vol. 31, Issue Part 1, No. 11 https://doi.org/10.1143/JJAP.31.3575	journal	November 1992
Studies of High-Frequency Acoustic Phonons Using Picosecond Optical Techniques Maris, H. J.; Thomsen, C.; Tauc, J. Phonon Scattering in Condensed Matter V, p. 374-380 https://doi.org/10.1007/978-3-642-82912-3_105	book	January 1986

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optical
stress
generator
detector
disclosed
characterization
films
interfaces
measurements
mechanical
thermal
properties
light
absorbed
film
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change
transmission
reflection
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analyzed
information
ultrasonic
waves
produced
obtained
measurement
methods
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determination
thickness
speed
accuracy
improved
compared
earlier
elastic
including
presence
roughness
defects
thermal properties
optical stress
stress generator
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Title: Optical stress generator and detector

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