Piezoelectrically tunable resonance frequency beam utilizing a stress-sensitive film

Patent · Tue Jan 01 00:00:00 EST 2002

OSTI ID:874196

Thundat, Thomas G ^[1]; Wachter, Eric A ^[2]

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1. Knoxville, TN
2. Oak Ridge, TN

Methods and apparatus for detecting particular frequencies of acoustic vibration utilize a piezoelectrically-tunable beam element having a piezoelectric layer and a stress sensitive layer and means for providing an electrical potential across the piezoelectric layer to controllably change the beam's stiffness and thereby change its resonance frequency. It is then determined from the response of the piezoelectrically-tunable beam element to the acoustical vibration to which the beam element is exposed whether or not a particular frequency or frequencies of acoustic vibration are detected.

• Research Organization: Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)
• DOE Contract Number: AC05-96OR22464
• Assignee: UT-Battelle, LLC (Oak Ridge, TN)
• Patent Number(s): US 6336366
• OSTI ID: 874196
• Country of Publication: United States
• Language: English

Related Subjects

piezoelectrically
tunable
resonance
frequency
beam
utilizing
stress-sensitive
film
methods
apparatus
detecting
frequencies
acoustic
vibration
utilize
piezoelectrically-tunable
element
piezoelectric
layer
stress
sensitive
means
providing
electrical
potential
controllably
change
beams
stiffness
determined
response
acoustical
exposed
detected
resonance frequency
sensitive film
acoustic vibration
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